Scalable Metal–Organic Chemical Vapor Deposition of High Quality PtSe2

Platinum diselenide (PtSe₂), a 2D noble metal dichalcogenide, has recently received significant attention due to its outstanding properties. It undergoes a semimetal to semiconductor transition when thinned, offers a bandgap in the infrared range, and exhibits excellent stability in ambient conditions. These properties make it a prime active material in optoelectronic and chemical sensing devices. However, there is a high demand for a synthesis method that can produce large-scale and reliable high-quality PtSe₂. In this study, the growth of PtSe₂ is presented by metal–organic vapor deposition on a variety of substrates. Comprehensive Raman, X-ray photoelectron, and X-ray diffraction spectroscopy, as well as scanning tunneling microscopy characterization reveals the high quality of the deposited PtSe₂. Domains within the films are found to be up to several hundreds of nanometers in size, and their highly ordered crystalline structure is evident from atomic-scale measurements. Electrical characterization demonstrates improved conductivity relative to conventional synthesis methods. This study provides fundamental guidance for the scalable synthesis and implementation of high quality PtSe₂ layers with controllable thickness, offering a key requirement for the implementation of PtSe₂ in future applications.