Xinyan Liu , Yongfeng Zhang , Yupeng Zhang , Zhengyu Bi , Jingran Zhou , Ruiliang Xu , Shengping Ruan
{"title":"基于氧化镁/锰硅异质结的高响应 MSM 紫外光检测器","authors":"Xinyan Liu , Yongfeng Zhang , Yupeng Zhang , Zhengyu Bi , Jingran Zhou , Ruiliang Xu , Shengping Ruan","doi":"10.1016/j.mssp.2024.108946","DOIUrl":null,"url":null,"abstract":"<div><div>Ultraviolet (UV) photodetectors (PDs) are favored for their wide range of applications. In this work, MgZnO/MnS composite films were prepared on quartz glass by sol-gel and successive ionic layer adsorption and reaction (SILAR) methods for UV photodetection. Compared with MgZnO device, the MgZnO/MnS device overcomes the drawbacks of lower carrier mobility and more traps in the original MgZnO photosensitive layer, and has ultrahigh responsivity and detectivity (4564.5 A/W, 1.7 × 10<sup>16</sup> Jones), high photocurrent (up to 1.8 × 10<sup>−3</sup> A), lower dark current (down to 8.8 × 10<sup>- 10</sup> A) and high light-dark ratio (up to about 8 × 10<sup>5</sup>), which is attributed to the formation of a p-n junction by the contact between MgZnO and MnS, resulting in the establishment of an internal electric field to serve as a depletion layer. The built-in electric field consumes most of the carriers so that the device exhibits a low conductivity, and MnS fills up some of the defects on the surface of the MgZnO, which results in a low dark current. Under UV radiation, photogenerated carriers are separated by built-in electric field, leading the recombination of electron-hole pairs decrease. This causes the device show high conductivity and generate high photocurrent. These results make MgZnO/MnS PDs promising for applications in device requiring high responsivity.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":null,"pages":null},"PeriodicalIF":4.2000,"publicationDate":"2024-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High response MSM UV photodetectors based on MgZnO/MnS heterojunction\",\"authors\":\"Xinyan Liu , Yongfeng Zhang , Yupeng Zhang , Zhengyu Bi , Jingran Zhou , Ruiliang Xu , Shengping Ruan\",\"doi\":\"10.1016/j.mssp.2024.108946\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Ultraviolet (UV) photodetectors (PDs) are favored for their wide range of applications. In this work, MgZnO/MnS composite films were prepared on quartz glass by sol-gel and successive ionic layer adsorption and reaction (SILAR) methods for UV photodetection. Compared with MgZnO device, the MgZnO/MnS device overcomes the drawbacks of lower carrier mobility and more traps in the original MgZnO photosensitive layer, and has ultrahigh responsivity and detectivity (4564.5 A/W, 1.7 × 10<sup>16</sup> Jones), high photocurrent (up to 1.8 × 10<sup>−3</sup> A), lower dark current (down to 8.8 × 10<sup>- 10</sup> A) and high light-dark ratio (up to about 8 × 10<sup>5</sup>), which is attributed to the formation of a p-n junction by the contact between MgZnO and MnS, resulting in the establishment of an internal electric field to serve as a depletion layer. The built-in electric field consumes most of the carriers so that the device exhibits a low conductivity, and MnS fills up some of the defects on the surface of the MgZnO, which results in a low dark current. Under UV radiation, photogenerated carriers are separated by built-in electric field, leading the recombination of electron-hole pairs decrease. This causes the device show high conductivity and generate high photocurrent. These results make MgZnO/MnS PDs promising for applications in device requiring high responsivity.</div></div>\",\"PeriodicalId\":18240,\"journal\":{\"name\":\"Materials Science in Semiconductor Processing\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.2000,\"publicationDate\":\"2024-09-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Science in Semiconductor Processing\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1369800124008424\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science in Semiconductor Processing","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1369800124008424","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
High response MSM UV photodetectors based on MgZnO/MnS heterojunction
Ultraviolet (UV) photodetectors (PDs) are favored for their wide range of applications. In this work, MgZnO/MnS composite films were prepared on quartz glass by sol-gel and successive ionic layer adsorption and reaction (SILAR) methods for UV photodetection. Compared with MgZnO device, the MgZnO/MnS device overcomes the drawbacks of lower carrier mobility and more traps in the original MgZnO photosensitive layer, and has ultrahigh responsivity and detectivity (4564.5 A/W, 1.7 × 1016 Jones), high photocurrent (up to 1.8 × 10−3 A), lower dark current (down to 8.8 × 10- 10 A) and high light-dark ratio (up to about 8 × 105), which is attributed to the formation of a p-n junction by the contact between MgZnO and MnS, resulting in the establishment of an internal electric field to serve as a depletion layer. The built-in electric field consumes most of the carriers so that the device exhibits a low conductivity, and MnS fills up some of the defects on the surface of the MgZnO, which results in a low dark current. Under UV radiation, photogenerated carriers are separated by built-in electric field, leading the recombination of electron-hole pairs decrease. This causes the device show high conductivity and generate high photocurrent. These results make MgZnO/MnS PDs promising for applications in device requiring high responsivity.
期刊介绍:
Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy.
Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications.
Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.