{"title":"用于单光束磁强计的化学抛光和两步低温阳极键合的微加工蒸气电池","authors":"","doi":"10.1016/j.measurement.2024.115744","DOIUrl":null,"url":null,"abstract":"<div><p>With the miniaturization of quantum sensors, the fabrication of alkali metal vapor cells based on micro-electromechanical systems (MEMS) has become increasingly important. However, the fabrication of MEMS vapor cells remains a challenge. In this study, a microfabricated millimeter-level vapor cell was fabricated and tested. The silicon cavity was fabricated by dry etching and chemical polishing. After injection of alkali metal and buffer gas, a two-step low-temperature anodic bonding was employed. The first step was non-isothermal to keep the alkali metal in the low-temperature pole plate and the second step was isothermal to improve the bonding strength, enhancing the hermeticity. Then, the vapor cell was tested for sidewall roughness, bonding strength, and leakage rate. Subsequently, Rb D1 line absorption spectroscopy, stability, and the single-beam magnetometer signal were tested. The results show the fabricated vapor cell had high stability, providing a basis for the miniaturization of quantum devices.</p></div>","PeriodicalId":18349,"journal":{"name":"Measurement","volume":null,"pages":null},"PeriodicalIF":5.2000,"publicationDate":"2024-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Microfabricated vapor cells with chemical polishing and two-step low-temperature anodic bonding for single-beam magnetometer\",\"authors\":\"\",\"doi\":\"10.1016/j.measurement.2024.115744\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>With the miniaturization of quantum sensors, the fabrication of alkali metal vapor cells based on micro-electromechanical systems (MEMS) has become increasingly important. However, the fabrication of MEMS vapor cells remains a challenge. In this study, a microfabricated millimeter-level vapor cell was fabricated and tested. The silicon cavity was fabricated by dry etching and chemical polishing. After injection of alkali metal and buffer gas, a two-step low-temperature anodic bonding was employed. The first step was non-isothermal to keep the alkali metal in the low-temperature pole plate and the second step was isothermal to improve the bonding strength, enhancing the hermeticity. Then, the vapor cell was tested for sidewall roughness, bonding strength, and leakage rate. Subsequently, Rb D1 line absorption spectroscopy, stability, and the single-beam magnetometer signal were tested. The results show the fabricated vapor cell had high stability, providing a basis for the miniaturization of quantum devices.</p></div>\",\"PeriodicalId\":18349,\"journal\":{\"name\":\"Measurement\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":5.2000,\"publicationDate\":\"2024-09-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Measurement\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0263224124016294\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Measurement","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0263224124016294","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MULTIDISCIPLINARY","Score":null,"Total":0}
Microfabricated vapor cells with chemical polishing and two-step low-temperature anodic bonding for single-beam magnetometer
With the miniaturization of quantum sensors, the fabrication of alkali metal vapor cells based on micro-electromechanical systems (MEMS) has become increasingly important. However, the fabrication of MEMS vapor cells remains a challenge. In this study, a microfabricated millimeter-level vapor cell was fabricated and tested. The silicon cavity was fabricated by dry etching and chemical polishing. After injection of alkali metal and buffer gas, a two-step low-temperature anodic bonding was employed. The first step was non-isothermal to keep the alkali metal in the low-temperature pole plate and the second step was isothermal to improve the bonding strength, enhancing the hermeticity. Then, the vapor cell was tested for sidewall roughness, bonding strength, and leakage rate. Subsequently, Rb D1 line absorption spectroscopy, stability, and the single-beam magnetometer signal were tested. The results show the fabricated vapor cell had high stability, providing a basis for the miniaturization of quantum devices.
期刊介绍:
Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.