基于 MOCVD 同外延 Ga2O3 薄膜的高响应度自供电肖特基势垒光探测器

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-09-11 DOI:10.1088/1361-6641/ad763a

Han Yu, Teng Jiao, Xinming Dang, Yu Han, Yihan Li, Zhen Li, Peiran Chen, Xin Dong, Guoxing Li, Yuantao Zhang and Baolin Zhang

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引用次数: 0

摘要

Ga2O3 是一种快速发展的宽禁带半导体，可用于日光盲区紫外线光电探测器（PDs）。目前，由异质外延 Ga2O3 薄膜制成的异质结自供电型 PD 的响应率和响应速度较低。在这项工作中，我们基于同外延生长的高质量 Ga2O3 薄膜制作了肖特基势垒 PD，该器件在不同偏置电压下均表现出高性能和高响应率。特别是，该器件在 0 V 时的响应率达到 90.3 mA W-1，光暗电流比 (PDCR) 为 3.2 × 104，检测率为 3.8 × 1013 Jones。这些结果证明了同外延 Ga2O3 薄膜在高性能器件领域的优势。

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Self-powered Schottky barrier photodetector with high responsivity based on homoepitaxial Ga2O3 films by MOCVD

Ga2O3 is a fast-developing wide band semiconductor for solar-blind ultraviolet photodetectors (PDs) applications. The heterojunction self-powered PDs fabricated from heteroepitaxial Ga2O3 films currently have low responsivity and response speed. In this work, we fabricated Schottky barrier PDs based on homoepitaxially grown high quality Ga2O3 films, which exhibited high performance with high responsivity at different bias voltages. In particular, the device achieves a responsivity of 90.3 mA W−1, a photo-to-dark current ratio (PDCR) of 3.2 × 104 and a detectivity of 3.8 × 1013 Jones at 0 V. In addition, a response time of superior to 5 ms is achieved. The results demonstrate the advantages of homoepitaxial Ga2O3 films in the field of high-performance devices.

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.