{"title":"未掺杂薄沟道对 AlGaN/GaN HEMT 表面相关电流塌陷影响的计算分析","authors":"Christos Zervos, Petros Beleniotis, Matthias Rudolph","doi":"10.1088/1361-6641/ad689c","DOIUrl":null,"url":null,"abstract":"This study provides an insight into the impact of thin purely undoped GaN channel thickness (<italic toggle=\"yes\">t</italic><sub>ch</sub>) on surface-related trapping effects in AlGaN/GaN high electron mobility transistors. Our TCAD study suggests that in cases where parasitic gate leakage is the driving trapping mechanism that promotes the injection of electrons from the Schottky gate contact into surface states, this effect can be alleviated by reducing <italic toggle=\"yes\">t</italic><sub>ch</sub> of the undoped GaN channel. We show that by decreasing <italic toggle=\"yes\">t</italic><sub>ch</sub> from 130 to 10 nm, devices exhibit a reduction in gate-related current collapse under the specific class-B RF operating bias conditions as a consequence of a substantial decrease in the off-state gate leakage with reducing <italic toggle=\"yes\">t</italic><sub>ch</sub>. Large-signal simulations revealed an increase by 3 W mm<sup>−1</sup> and about 12% output power and power-added efficiency due to the decrease of gate-related collapse. This work, for the first time, highlights the role of a proper purely undoped GaN <italic toggle=\"yes\">t</italic><sub>ch</sub> selection to alleviate gate-related surface trapping in the design of GaN-based microwave power amplifiers.","PeriodicalId":21585,"journal":{"name":"Semiconductor Science and Technology","volume":"11 1","pages":""},"PeriodicalIF":1.9000,"publicationDate":"2024-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A computational analysis of the impact of thin undoped channels in surface-related current collapse of AlGaN/GaN HEMTs\",\"authors\":\"Christos Zervos, Petros Beleniotis, Matthias Rudolph\",\"doi\":\"10.1088/1361-6641/ad689c\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This study provides an insight into the impact of thin purely undoped GaN channel thickness (<italic toggle=\\\"yes\\\">t</italic><sub>ch</sub>) on surface-related trapping effects in AlGaN/GaN high electron mobility transistors. Our TCAD study suggests that in cases where parasitic gate leakage is the driving trapping mechanism that promotes the injection of electrons from the Schottky gate contact into surface states, this effect can be alleviated by reducing <italic toggle=\\\"yes\\\">t</italic><sub>ch</sub> of the undoped GaN channel. We show that by decreasing <italic toggle=\\\"yes\\\">t</italic><sub>ch</sub> from 130 to 10 nm, devices exhibit a reduction in gate-related current collapse under the specific class-B RF operating bias conditions as a consequence of a substantial decrease in the off-state gate leakage with reducing <italic toggle=\\\"yes\\\">t</italic><sub>ch</sub>. Large-signal simulations revealed an increase by 3 W mm<sup>−1</sup> and about 12% output power and power-added efficiency due to the decrease of gate-related collapse. This work, for the first time, highlights the role of a proper purely undoped GaN <italic toggle=\\\"yes\\\">t</italic><sub>ch</sub> selection to alleviate gate-related surface trapping in the design of GaN-based microwave power amplifiers.\",\"PeriodicalId\":21585,\"journal\":{\"name\":\"Semiconductor Science and Technology\",\"volume\":\"11 1\",\"pages\":\"\"},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2024-08-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Semiconductor Science and Technology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6641/ad689c\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Semiconductor Science and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6641/ad689c","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
本研究深入探讨了纯粹未掺杂氮化镓沟道薄厚度(tch)对氮化镓/氮化镓高电子迁移率晶体管中表面相关捕获效应的影响。我们的 TCAD 研究表明,在寄生栅极漏电是促进电子从肖特基栅极接触注入表面态的驱动捕获机制的情况下,可以通过减小未掺杂 GaN 沟道的 tch 来缓解这种效应。我们的研究表明,在特定的 B 类射频工作偏置条件下,通过将 tch 从 130 纳米减小到 10 纳米,器件与栅极相关的电流塌缩有所减小,这是因为随着 tch 的减小,离态栅极漏电流大幅减小。大信号模拟显示,由于栅极相关塌陷的减少,输出功率和功率附加效率分别提高了 3 W mm-1、约 12%。这项研究首次强调了在设计基于氮化镓的微波功率放大器时,正确选择纯非掺杂氮化镓的栅极弛豫时间对减轻栅极相关表面陷波的作用。
A computational analysis of the impact of thin undoped channels in surface-related current collapse of AlGaN/GaN HEMTs
This study provides an insight into the impact of thin purely undoped GaN channel thickness (tch) on surface-related trapping effects in AlGaN/GaN high electron mobility transistors. Our TCAD study suggests that in cases where parasitic gate leakage is the driving trapping mechanism that promotes the injection of electrons from the Schottky gate contact into surface states, this effect can be alleviated by reducing tch of the undoped GaN channel. We show that by decreasing tch from 130 to 10 nm, devices exhibit a reduction in gate-related current collapse under the specific class-B RF operating bias conditions as a consequence of a substantial decrease in the off-state gate leakage with reducing tch. Large-signal simulations revealed an increase by 3 W mm−1 and about 12% output power and power-added efficiency due to the decrease of gate-related collapse. This work, for the first time, highlights the role of a proper purely undoped GaN tch selection to alleviate gate-related surface trapping in the design of GaN-based microwave power amplifiers.
期刊介绍:
Devoted to semiconductor research, Semiconductor Science and Technology''s multidisciplinary approach reflects the far-reaching nature of this topic.
The scope of the journal covers fundamental and applied experimental and theoretical studies of the properties of non-organic, organic and oxide semiconductors, their interfaces and devices, including:
fundamental properties
materials and nanostructures
devices and applications
fabrication and processing
new analytical techniques
simulation
emerging fields:
materials and devices for quantum technologies
hybrid structures and devices
2D and topological materials
metamaterials
semiconductors for energy
flexible electronics.