{"title":"玻璃基板和玻璃通孔 (TGV) 的热机械可靠性:全面回顾","authors":"Yangyang Lai, Ke Pan, Seungbae Park","doi":"10.1016/j.microrel.2024.115477","DOIUrl":null,"url":null,"abstract":"<div><p>The evolution of electronic packaging technology towards the adoption of glass substrates marks a significant advancement in overcoming the constraints posed by traditional organic materials. This review delves into the thermo-mechanical reliability concerns associated with glass substrates, glass interposers, and Through Glass Vias (TGV), highlighting the inherent fragility of glass and its susceptibility to cracking as key challenges in their widespread application. The unique tunable modulus and closely matched coefficient of thermal expansion (CTE) to silicon, offer promising solutions to stress-related failures, particularly in large-format applications. Despite these advantages, the integration of glass substrates faces obstacles such as stress management, fragility, adhesion issues, and the uniformity of via fills, compounded by the limited availability of long-term reliability data. This paper provides a comprehensive overview of the fabrication processes for glass substrates and TGVs, the impact of design parameters such as via density and aspect ratio on glass substrate reliability, and the mitigation strategies for stress and crack of TGV. Through the examination of Finite Element Analysis (FEA) models and experimental data, we explore the delicate balance between the stress induced by Redistribution Layers (RDL) and the fracture strength of glass, influenced by various design factors. The review also considers the potential of glass substrates in high-density interconnects and advanced packaging architectures, positioning glass as a transformative material in the future of electronic packaging.</p></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":"161 ","pages":"Article 115477"},"PeriodicalIF":1.6000,"publicationDate":"2024-08-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Thermo-mechanical reliability of glass substrate and Through Glass Vias (TGV): A comprehensive review\",\"authors\":\"Yangyang Lai, Ke Pan, Seungbae Park\",\"doi\":\"10.1016/j.microrel.2024.115477\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The evolution of electronic packaging technology towards the adoption of glass substrates marks a significant advancement in overcoming the constraints posed by traditional organic materials. This review delves into the thermo-mechanical reliability concerns associated with glass substrates, glass interposers, and Through Glass Vias (TGV), highlighting the inherent fragility of glass and its susceptibility to cracking as key challenges in their widespread application. The unique tunable modulus and closely matched coefficient of thermal expansion (CTE) to silicon, offer promising solutions to stress-related failures, particularly in large-format applications. Despite these advantages, the integration of glass substrates faces obstacles such as stress management, fragility, adhesion issues, and the uniformity of via fills, compounded by the limited availability of long-term reliability data. This paper provides a comprehensive overview of the fabrication processes for glass substrates and TGVs, the impact of design parameters such as via density and aspect ratio on glass substrate reliability, and the mitigation strategies for stress and crack of TGV. Through the examination of Finite Element Analysis (FEA) models and experimental data, we explore the delicate balance between the stress induced by Redistribution Layers (RDL) and the fracture strength of glass, influenced by various design factors. The review also considers the potential of glass substrates in high-density interconnects and advanced packaging architectures, positioning glass as a transformative material in the future of electronic packaging.</p></div>\",\"PeriodicalId\":51131,\"journal\":{\"name\":\"Microelectronics Reliability\",\"volume\":\"161 \",\"pages\":\"Article 115477\"},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2024-08-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectronics Reliability\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0026271424001574\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronics Reliability","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0026271424001574","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
电子封装技术朝着采用玻璃基板的方向发展,标志着在克服传统有机材料的限制方面取得了重大进展。本综述深入探讨了与玻璃基板、玻璃中间膜和玻璃通孔 (TGV) 相关的热机械可靠性问题,强调玻璃固有的易碎性和易开裂性是其广泛应用所面临的主要挑战。玻璃独特的可调模量和与硅密切匹配的热膨胀系数(CTE),为解决应力相关故障,尤其是大尺寸应用中的应力相关故障,提供了前景广阔的解决方案。尽管具有这些优势,但玻璃基板的集成仍面临着应力管理、易碎性、粘附性问题和通孔填充均匀性等障碍,加之长期可靠性数据有限。本文全面概述了玻璃基板和 TGV 的制造工艺、通孔密度和纵横比等设计参数对玻璃基板可靠性的影响,以及 TGV 应力和裂纹的缓解策略。通过研究有限元分析 (FEA) 模型和实验数据,我们探讨了再分布层 (RDL) 诱导的应力与玻璃断裂强度之间受各种设计因素影响的微妙平衡。综述还考虑了玻璃基板在高密度互连和先进封装架构中的潜力,将玻璃定位为未来电子封装的变革性材料。
Thermo-mechanical reliability of glass substrate and Through Glass Vias (TGV): A comprehensive review
The evolution of electronic packaging technology towards the adoption of glass substrates marks a significant advancement in overcoming the constraints posed by traditional organic materials. This review delves into the thermo-mechanical reliability concerns associated with glass substrates, glass interposers, and Through Glass Vias (TGV), highlighting the inherent fragility of glass and its susceptibility to cracking as key challenges in their widespread application. The unique tunable modulus and closely matched coefficient of thermal expansion (CTE) to silicon, offer promising solutions to stress-related failures, particularly in large-format applications. Despite these advantages, the integration of glass substrates faces obstacles such as stress management, fragility, adhesion issues, and the uniformity of via fills, compounded by the limited availability of long-term reliability data. This paper provides a comprehensive overview of the fabrication processes for glass substrates and TGVs, the impact of design parameters such as via density and aspect ratio on glass substrate reliability, and the mitigation strategies for stress and crack of TGV. Through the examination of Finite Element Analysis (FEA) models and experimental data, we explore the delicate balance between the stress induced by Redistribution Layers (RDL) and the fracture strength of glass, influenced by various design factors. The review also considers the potential of glass substrates in high-density interconnects and advanced packaging architectures, positioning glass as a transformative material in the future of electronic packaging.
期刊介绍:
Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged.
Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.