层状六方氮化硼晶体在铜箔上的生长机理

IF 1.5 4区 材料科学 Q3 Chemistry
Xia Lei, Guangcun Gao, Jieqiong Wang
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引用次数: 0

摘要

二维六方氮化硼(h-BN)具有与石墨烯相似的蜂窝状晶格结构,是一种具有广泛应用前景的介电材料。本文报告了在常压下通过化学气相沉积(CVD)在铜箔上生长出高质量、大尺寸多层 h-BN 晶体的过程。单个独立的 h-BN 六方晶体的尺寸约为 20 µm,厚度为 3 nm。本文研究了影响 h-BN 生长过程的变量以及生长过程中的微观结构变化。通过分析化学气相沉积的热和动态过程,得出了气相中生长的 h-BN 质量与各种温度和压力因素之间的关系。这些信息被用于开发适用于商业铜箔生长的参数。最后,利用优化条件,在高压和低气流条件下生长出高质量的 h-BN。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

The Growth Mechanism of Layered Hexagonal Boron Nitride Crystal on Copper Foil

The Growth Mechanism of Layered Hexagonal Boron Nitride Crystal on Copper Foil

2D hexagonal boron nitride (h-BN), which has a similar honeycomb lattice structure to graphene, is a promising dielectric material for a wide variety of applications. Herein, the growth of high-quality and large-size multilayer h-BN crystals on Cu foils is reported by chemical vapor deposition (CVD) at atmospheric pressure. The size of an individual isolated hexagonal crystal of h-BN is about 20 µm, and the thickness is 3 nm. This paper studies the variables that affect h-BN growth during the process and the microstructure changes during the growth. Through analysis of the thermal and dynamic processes of chemical vapor deposition, relationships are derived between the mass of h-BN grown in the gas phase and various temperature and pressure factors. This information is used to develop appropriate parameters for commercial copper foil growth. Finally, using optimized conditions, high-quality h-BN at high pressure and low gas flow conditions are grown.

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来源期刊
CiteScore
2.50
自引率
6.70%
发文量
121
审稿时长
1.9 months
期刊介绍: The journal Crystal Research and Technology is a pure online Journal (since 2012). Crystal Research and Technology is an international journal examining all aspects of research within experimental, industrial, and theoretical crystallography. The journal covers the relevant aspects of -crystal growth techniques and phenomena (including bulk growth, thin films) -modern crystalline materials (e.g. smart materials, nanocrystals, quasicrystals, liquid crystals) -industrial crystallisation -application of crystals in materials science, electronics, data storage, and optics -experimental, simulation and theoretical studies of the structural properties of crystals -crystallographic computing
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