{"title":"设计和分析用于在潮湿和干燥环境中检测多种生物分子的硅-锗异质结构隧道场效应晶体管生物传感器","authors":"Prarthana Chakraborti, Abhijit Biswas, Abhijit Mallik","doi":"10.1007/s00542-024-05726-8","DOIUrl":null,"url":null,"abstract":"<p>This paper reports the design and analysis of Si-Ge hetero structure planner TFET employed for the detection of various neutral biomolecules having dielectric constants ranging from 2.1 to 46.7 in both dry and wet environments. The proposed TFET sensor consists of the p <sup>+</sup>Ge source attached with an n <sup>+</sup>SiGe pocket extending towards the p <sup>+</sup>Si channel which is attached to the n <sup>+ </sup>Si drain. SiO<sub>2</sub> acts as the receptor layer and the region of gate oxide is sculpted into a shape of rectangular cavity in which biomolecules may be included. A well-calibrated SILVACO ATLAS device simulator is employed to obtain the device transfer characteristics which are exploited to extract the sensitivity of biomolecules. The impact of molar concentration in SiGe, and also the gate source overlap length on sensitivity of biomolecules in both dry and wet environments are investigated. The variation of sensitivity is obtained with the dielectric constant of biomolecules and a comparative analysis is conducted for both dry and wet environments. The design of the sensing device is then optimised and the maximum sensitivity of 2.38 V is obtained in the wet environment condition which is higher or comparable to earlier reported data.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"50 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-07-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design and analysis of Si-Ge heterostructure tunnel FET biosensors for detection of a wide range of biomolecules in both wet and dry environments\",\"authors\":\"Prarthana Chakraborti, Abhijit Biswas, Abhijit Mallik\",\"doi\":\"10.1007/s00542-024-05726-8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>This paper reports the design and analysis of Si-Ge hetero structure planner TFET employed for the detection of various neutral biomolecules having dielectric constants ranging from 2.1 to 46.7 in both dry and wet environments. The proposed TFET sensor consists of the p <sup>+</sup>Ge source attached with an n <sup>+</sup>SiGe pocket extending towards the p <sup>+</sup>Si channel which is attached to the n <sup>+ </sup>Si drain. SiO<sub>2</sub> acts as the receptor layer and the region of gate oxide is sculpted into a shape of rectangular cavity in which biomolecules may be included. A well-calibrated SILVACO ATLAS device simulator is employed to obtain the device transfer characteristics which are exploited to extract the sensitivity of biomolecules. The impact of molar concentration in SiGe, and also the gate source overlap length on sensitivity of biomolecules in both dry and wet environments are investigated. The variation of sensitivity is obtained with the dielectric constant of biomolecules and a comparative analysis is conducted for both dry and wet environments. The design of the sensing device is then optimised and the maximum sensitivity of 2.38 V is obtained in the wet environment condition which is higher or comparable to earlier reported data.</p>\",\"PeriodicalId\":18544,\"journal\":{\"name\":\"Microsystem Technologies\",\"volume\":\"50 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-07-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microsystem Technologies\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/s00542-024-05726-8\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystem Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s00542-024-05726-8","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
本文报告了硅-锗异质结构平面 TFET 的设计和分析,该器件用于在干燥和潮湿环境中检测介电常数介于 2.1 到 46.7 之间的各种中性生物分子。拟议的 TFET 传感器由 p +Ge 源和 n +SiGe 沟道组成,p +Si 沟道连接到 n +Si 漏极。二氧化硅充当受体层,栅极氧化物区域被雕刻成矩形空腔的形状,生物分子可被纳入其中。利用校准良好的 SILVACO ATLAS 器件模拟器获得器件传输特性,并利用这些特性提取生物分子的灵敏度。研究了硅锗摩尔浓度以及栅源重叠长度对生物分子在干燥和潮湿环境中灵敏度的影响。灵敏度随生物分子介电常数的变化而变化,并对干燥和潮湿环境进行了比较分析。然后对传感设备的设计进行了优化,在潮湿环境条件下获得了 2.38 V 的最大灵敏度,高于或类似于早期报告的数据。
Design and analysis of Si-Ge heterostructure tunnel FET biosensors for detection of a wide range of biomolecules in both wet and dry environments
This paper reports the design and analysis of Si-Ge hetero structure planner TFET employed for the detection of various neutral biomolecules having dielectric constants ranging from 2.1 to 46.7 in both dry and wet environments. The proposed TFET sensor consists of the p +Ge source attached with an n +SiGe pocket extending towards the p +Si channel which is attached to the n + Si drain. SiO2 acts as the receptor layer and the region of gate oxide is sculpted into a shape of rectangular cavity in which biomolecules may be included. A well-calibrated SILVACO ATLAS device simulator is employed to obtain the device transfer characteristics which are exploited to extract the sensitivity of biomolecules. The impact of molar concentration in SiGe, and also the gate source overlap length on sensitivity of biomolecules in both dry and wet environments are investigated. The variation of sensitivity is obtained with the dielectric constant of biomolecules and a comparative analysis is conducted for both dry and wet environments. The design of the sensing device is then optimised and the maximum sensitivity of 2.38 V is obtained in the wet environment condition which is higher or comparable to earlier reported data.