Valentin Daniel , Jérémie Chretien , Sonia Blais , Jinyoun Cho , Kristof Dessein , Gwenaelle Hamon , Abderraouf Boucherif , Maxime Darnon
{"title":"单晶多孔锗在不同储存环境中的形态和化学演变","authors":"Valentin Daniel , Jérémie Chretien , Sonia Blais , Jinyoun Cho , Kristof Dessein , Gwenaelle Hamon , Abderraouf Boucherif , Maxime Darnon","doi":"10.1016/j.mne.2024.100274","DOIUrl":null,"url":null,"abstract":"<div><p>Mesoporous germanium (MP-Ge) emerges as a very appealing material for many applications such as anode material for Lithium-Ion batteries due to it high specific area and large void spaces or, in optoelectronics as sacrificial layer for III-V materials growth and detachment, allowing notably several uses of a single Ge substrate<u><em>.</em></u> These porous nanostructures are distinguished by a large specific surface area and are prone to degradation with time due to exposure to the environment. To understand and be able to reduce this effect, we studied the chemical and morphological evolution of porous germanium layers under various ambient storage conditions for 3 months to identify the main parameters responsible for material degradation. This study demonstrates that the ambient air environment leads to the growth of native oxide, leading to major morphology changes. Scanning electrons microscope (SEM) showed the formation of clusters and the enlargement of the pores after 90 days. These structural modifications are caused by the oxidation of Ge, and more specifically by the creation of GeO<sub>2</sub> matrices due to the synergy of dioxygen (O<sub>2</sub>) and humidity (H<sub>2</sub>O<sub>(g)</sub>). The energy brought by light can exacerbate these phenomena and thus accelerate the degradation rate of the pore morphology. Based on these experimental results, we propose efficient solutions to limit the GeO<sub>2</sub> proportions and the clusters' appearance, by storing them under a dry neutral atmosphere (Ar) or by adding a hydrogen halide pre-treatment (10s 1% HBr solution).</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"24 ","pages":"Article 100274"},"PeriodicalIF":2.8000,"publicationDate":"2024-07-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000376/pdfft?md5=af41d282b5736f24ee5d09a09560c11a&pid=1-s2.0-S2590007224000376-main.pdf","citationCount":"0","resultStr":"{\"title\":\"Morphological and chemical evolution of monocrystalline porous germanium over time in various storage environments\",\"authors\":\"Valentin Daniel , Jérémie Chretien , Sonia Blais , Jinyoun Cho , Kristof Dessein , Gwenaelle Hamon , Abderraouf Boucherif , Maxime Darnon\",\"doi\":\"10.1016/j.mne.2024.100274\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Mesoporous germanium (MP-Ge) emerges as a very appealing material for many applications such as anode material for Lithium-Ion batteries due to it high specific area and large void spaces or, in optoelectronics as sacrificial layer for III-V materials growth and detachment, allowing notably several uses of a single Ge substrate<u><em>.</em></u> These porous nanostructures are distinguished by a large specific surface area and are prone to degradation with time due to exposure to the environment. To understand and be able to reduce this effect, we studied the chemical and morphological evolution of porous germanium layers under various ambient storage conditions for 3 months to identify the main parameters responsible for material degradation. This study demonstrates that the ambient air environment leads to the growth of native oxide, leading to major morphology changes. Scanning electrons microscope (SEM) showed the formation of clusters and the enlargement of the pores after 90 days. These structural modifications are caused by the oxidation of Ge, and more specifically by the creation of GeO<sub>2</sub> matrices due to the synergy of dioxygen (O<sub>2</sub>) and humidity (H<sub>2</sub>O<sub>(g)</sub>). The energy brought by light can exacerbate these phenomena and thus accelerate the degradation rate of the pore morphology. Based on these experimental results, we propose efficient solutions to limit the GeO<sub>2</sub> proportions and the clusters' appearance, by storing them under a dry neutral atmosphere (Ar) or by adding a hydrogen halide pre-treatment (10s 1% HBr solution).</p></div>\",\"PeriodicalId\":37111,\"journal\":{\"name\":\"Micro and Nano Engineering\",\"volume\":\"24 \",\"pages\":\"Article 100274\"},\"PeriodicalIF\":2.8000,\"publicationDate\":\"2024-07-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.sciencedirect.com/science/article/pii/S2590007224000376/pdfft?md5=af41d282b5736f24ee5d09a09560c11a&pid=1-s2.0-S2590007224000376-main.pdf\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nano Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2590007224000376\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nano Engineering","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2590007224000376","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
介孔锗(MP-Ge)因其高比表面积和大空隙,在许多应用领域成为一种极具吸引力的材料,例如用作锂离子电池的负极材料,或在光电子学中用作 III-V 材料生长和分离的牺牲层,从而使单一的 Ge 衬底具有多种用途。这些多孔纳米结构的特点是比表面积大,暴露在环境中容易随时间退化。为了了解并减少这种影响,我们研究了多孔锗层在各种环境储存条件下 3 个月的化学和形态演变,以确定导致材料降解的主要参数。这项研究表明,环境空气环境会导致原生氧化物的生长,从而导致形态发生重大变化。扫描电子显微镜(SEM)显示,90 天后形成了团块并扩大了孔隙。这些结构变化是由 Ge 氧化引起的,更具体地说,是由于二氧(O2)和湿度(H2O(g))的协同作用产生了 GeO2 基质。光带来的能量会加剧这些现象,从而加快孔隙形态的退化速度。根据这些实验结果,我们提出了限制 GeO2 比例和晶簇出现的有效解决方案,即在干燥的中性气氛(Ar)下储存或添加卤化氢预处理(10s 1%HBr溶液)。
Morphological and chemical evolution of monocrystalline porous germanium over time in various storage environments
Mesoporous germanium (MP-Ge) emerges as a very appealing material for many applications such as anode material for Lithium-Ion batteries due to it high specific area and large void spaces or, in optoelectronics as sacrificial layer for III-V materials growth and detachment, allowing notably several uses of a single Ge substrate. These porous nanostructures are distinguished by a large specific surface area and are prone to degradation with time due to exposure to the environment. To understand and be able to reduce this effect, we studied the chemical and morphological evolution of porous germanium layers under various ambient storage conditions for 3 months to identify the main parameters responsible for material degradation. This study demonstrates that the ambient air environment leads to the growth of native oxide, leading to major morphology changes. Scanning electrons microscope (SEM) showed the formation of clusters and the enlargement of the pores after 90 days. These structural modifications are caused by the oxidation of Ge, and more specifically by the creation of GeO2 matrices due to the synergy of dioxygen (O2) and humidity (H2O(g)). The energy brought by light can exacerbate these phenomena and thus accelerate the degradation rate of the pore morphology. Based on these experimental results, we propose efficient solutions to limit the GeO2 proportions and the clusters' appearance, by storing them under a dry neutral atmosphere (Ar) or by adding a hydrogen halide pre-treatment (10s 1% HBr solution).