Rayabarapu Venkateswarlu, Bibhudendra Acharya, Guru Prasad Mishra
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引用次数: 0
摘要
利用 Silvaco TCAD 仿真工具,提出了一种双 π 栅工程技术,通过减少表面陷阱和缓冲陷阱来分析器件性能并提高可靠性。栅极下 Vgs 产生的峰值电场会降低器件性能并导致记忆效应。峰值电场会破坏沟道中的电荷载流子密度 (2-DEG),降低沟道中的电荷载流子密度,导致电流崩溃。峰值电场使电子/空穴(在 n 型/p 型中)通电(热电子),并通过捕获/去捕获过程注入缓冲区和其他外延层。由于陷波/去陷波作用,会出现漏极电流崩溃(∆ Idmax)和阈值电压偏移(∆Vth)。所建议的方法具有 T 形栅极,该栅极被分成 3 个支柱,称为双π形栅极结构。所建议的技术获得的结果表明,沟道中的峰值电流和均匀的电场分布是完美的。分析了脉冲 I-V、脉冲 C-V 和脉冲 S 参数的直流特性,以研究陷波效应。
Double π-gate AlGaN/GaN HEMT with reduced surface and buffer traps and enhanced reliability
A double π-gate engineering technique is proposed to analyse the device performance and enhance the reliability by reducing the surface traps and buffer traps using Silvaco TCAD simulator tool. Peak electric field due to Vgs, under the gate can worse the device performance and cause memory effects. The peak electric field destructs the charge carrier density (2-DEG) in the channel, lowers the charge carrier density in the channel and results in current collapse. The peak electric field make the electrons/holes (in n-type/p-type) to get energized (hot electron) and injected into buffer region and other epi-layers by the process trapping/de-trapping. Drain current collapse (∆ Idmax) and threshold voltage shift (∆Vth) occur due to trapping/de-trapping. Proposed method has T-gate which is spilt into 3-pillars referred to as double-π shaped gate structure. Results obtained from the suggested technique showed that perfect peak current in the channel and uniform electric field distribution is achieved. The dc characteristics pulsed I-V, pulsed C-V, and pulsed S-parameters are analysed to study the trapping effects.
期刊介绍:
Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged.
Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.