{"title":"无序状态多组分半导体中的原子扩散建模","authors":"S. M. Asadov","doi":"10.1134/s1063739724600092","DOIUrl":null,"url":null,"abstract":"<h3 data-test=\"abstract-sub-heading\">Abstract</h3><p>Density functional theory (DFT) using the generalized gradient approximation (GGA) made it possible to optimize the crystal structure, calculate the lattice parameters and band structure of <span>\\({\\text{TlM}}{{{\\text{S}}}_{2}}~\\)</span>(M = Ga, In) semiconductor compounds with a monoclinic structure (space group <span>\\(C2{\\text{/}}c\\)</span>, no. 15). DFT calculations of the structure of compounds were expanded using two exchange-correlation functionals GGA-PBE and GGA + <span>\\(U\\)</span> (<i>U</i> is the Coulomb parameter) with a value of <span>\\(U - J\\)</span> = 2.1 eV (effective interaction parameter). Thermal diffusion coefficients (<span>\\({{D}_{\\alpha }}\\)</span>) of atoms of individual types (α), i.e. atoms of thallium, gallium, indium and sulfur near the melting point of the <span>\\({\\text{TlM}}{{{\\text{S}}}_{2}}\\)</span> compound were calculated by the molecular dynamics (MD) method. The <span>\\({{D}_{\\alpha }}\\)</span> values of <span>\\({\\text{TlM}}{{{\\text{S}}}_{2}}\\)</span> atoms were obtained in the local neutrality approximation using the canonical <span>\\(NVT\\)</span> MD ensemble. The <span>\\({{D}_{\\alpha }}\\)</span> values of the atoms were corrected to take into account the root-mean-square displacements of the atoms at a given time and temperature. The dependences <span>\\({{D}_{\\alpha }} = ~f(1{\\text{/}}T)\\)</span> of <span>\\({\\text{TlM}}{{{\\text{S}}}_{2}}\\)</span> atoms, described by the Arrhenius law, were constructed. The activation energy of atomic diffusion was calculated.</p>","PeriodicalId":21534,"journal":{"name":"Russian Microelectronics","volume":"7 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-06-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Modeling the Diffusion of Atoms in Multicomponent Semiconductors in a Disordered State\",\"authors\":\"S. M. Asadov\",\"doi\":\"10.1134/s1063739724600092\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<h3 data-test=\\\"abstract-sub-heading\\\">Abstract</h3><p>Density functional theory (DFT) using the generalized gradient approximation (GGA) made it possible to optimize the crystal structure, calculate the lattice parameters and band structure of <span>\\\\({\\\\text{TlM}}{{{\\\\text{S}}}_{2}}~\\\\)</span>(M = Ga, In) semiconductor compounds with a monoclinic structure (space group <span>\\\\(C2{\\\\text{/}}c\\\\)</span>, no. 15). DFT calculations of the structure of compounds were expanded using two exchange-correlation functionals GGA-PBE and GGA + <span>\\\\(U\\\\)</span> (<i>U</i> is the Coulomb parameter) with a value of <span>\\\\(U - J\\\\)</span> = 2.1 eV (effective interaction parameter). Thermal diffusion coefficients (<span>\\\\({{D}_{\\\\alpha }}\\\\)</span>) of atoms of individual types (α), i.e. atoms of thallium, gallium, indium and sulfur near the melting point of the <span>\\\\({\\\\text{TlM}}{{{\\\\text{S}}}_{2}}\\\\)</span> compound were calculated by the molecular dynamics (MD) method. The <span>\\\\({{D}_{\\\\alpha }}\\\\)</span> values of <span>\\\\({\\\\text{TlM}}{{{\\\\text{S}}}_{2}}\\\\)</span> atoms were obtained in the local neutrality approximation using the canonical <span>\\\\(NVT\\\\)</span> MD ensemble. The <span>\\\\({{D}_{\\\\alpha }}\\\\)</span> values of the atoms were corrected to take into account the root-mean-square displacements of the atoms at a given time and temperature. The dependences <span>\\\\({{D}_{\\\\alpha }} = ~f(1{\\\\text{/}}T)\\\\)</span> of <span>\\\\({\\\\text{TlM}}{{{\\\\text{S}}}_{2}}\\\\)</span> atoms, described by the Arrhenius law, were constructed. The activation energy of atomic diffusion was calculated.</p>\",\"PeriodicalId\":21534,\"journal\":{\"name\":\"Russian Microelectronics\",\"volume\":\"7 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-06-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Russian Microelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1134/s1063739724600092\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Russian Microelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1134/s1063739724600092","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Engineering","Score":null,"Total":0}
Modeling the Diffusion of Atoms in Multicomponent Semiconductors in a Disordered State
Abstract
Density functional theory (DFT) using the generalized gradient approximation (GGA) made it possible to optimize the crystal structure, calculate the lattice parameters and band structure of \({\text{TlM}}{{{\text{S}}}_{2}}~\)(M = Ga, In) semiconductor compounds with a monoclinic structure (space group \(C2{\text{/}}c\), no. 15). DFT calculations of the structure of compounds were expanded using two exchange-correlation functionals GGA-PBE and GGA + \(U\) (U is the Coulomb parameter) with a value of \(U - J\) = 2.1 eV (effective interaction parameter). Thermal diffusion coefficients (\({{D}_{\alpha }}\)) of atoms of individual types (α), i.e. atoms of thallium, gallium, indium and sulfur near the melting point of the \({\text{TlM}}{{{\text{S}}}_{2}}\) compound were calculated by the molecular dynamics (MD) method. The \({{D}_{\alpha }}\) values of \({\text{TlM}}{{{\text{S}}}_{2}}\) atoms were obtained in the local neutrality approximation using the canonical \(NVT\) MD ensemble. The \({{D}_{\alpha }}\) values of the atoms were corrected to take into account the root-mean-square displacements of the atoms at a given time and temperature. The dependences \({{D}_{\alpha }} = ~f(1{\text{/}}T)\) of \({\text{TlM}}{{{\text{S}}}_{2}}\) atoms, described by the Arrhenius law, were constructed. The activation energy of atomic diffusion was calculated.
期刊介绍:
Russian Microelectronics covers physical, technological, and some VLSI and ULSI circuit-technical aspects of microelectronics and nanoelectronics; it informs the reader of new trends in submicron optical, x-ray, electron, and ion-beam lithography technology; dry processing techniques, etching, doping; and deposition and planarization technology. Significant space is devoted to problems arising in the application of proton, electron, and ion beams, plasma, etc. Consideration is given to new equipment, including cluster tools and control in situ and submicron CMOS, bipolar, and BICMOS technologies. The journal publishes papers addressing problems of molecular beam epitaxy and related processes; heterojunction devices and integrated circuits; the technology and devices of nanoelectronics; and the fabrication of nanometer scale devices, including new device structures, quantum-effect devices, and superconducting devices. The reader will find papers containing news of the diagnostics of surfaces and microelectronic structures, the modeling of technological processes and devices in micro- and nanoelectronics, including nanotransistors, and solid state qubits.