{"title":"考虑界面陷阱电荷的掺电无结 TFET(带金属带和异质材料)的理论和仿真评估","authors":"Bandi Venkata Chandan, Kaushal Kumar Nigam","doi":"10.1016/j.microrel.2024.115393","DOIUrl":null,"url":null,"abstract":"<div><p>The fabrication complexity, ambipolar current conduction (<span><math><msub><mrow><mi>I</mi></mrow><mrow><mi>a</mi><mi>m</mi><mi>b</mi><mi>i</mi></mrow></msub></math></span>), inferior ON-state current (<span><math><msub><mrow><mi>I</mi></mrow><mrow><mi>o</mi><mi>n</mi></mrow></msub></math></span>), and poor analog/RF performance are major limitations of conventional tunnel field-effect transistors (TFETs). To address these challenges, we propose a novel approach utilizing hetero-material (HM) and metal-strip (MS) technology to develop an electrically doped junctionless TFET (HM-MS-ED-JL-TFET). Utilizing work function engineering (4.72 eV) at the control gate (CG) establishes an intrinsic region along the channel, while a combination of work function engineering (4.72 eV) and a polarity bias (electrically doped) of PG = -1.2 V at the polarity gate (PG) induces a <span><math><msup><mrow><mi>P</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span> region across the source, forming an <span><math><msup><mrow><mi>N</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span>-i-<span><math><msup><mrow><mi>P</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span> structure over the thin <span><math><msup><mrow><mi>N</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span>-<span><math><msup><mrow><mi>N</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span>-<span><math><msup><mrow><mi>N</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span> silicon body. This approach effectively mitigates concerns regarding random dopant fluctuations (RDF) without necessitating a thermal budget, streamlining fabrication compared to conventional TFETs. Furthermore, the integration of hetero-material into the source region narrows the tunneling barrier width, enhancing band-to-band tunneling at the source-channel interface and improving critical metrics such as ON-state current (<span><math><msub><mrow><mi>I</mi></mrow><mrow><mi>o</mi><mi>n</mi></mrow></msub></math></span>), subthreshold slope (SS), transconductance (<span><math><msub><mrow><mi>g</mi></mrow><mrow><mi>m</mi></mrow></msub></math></span>), and cut-off frequency (<span><math><msub><mrow><mi>f</mi></mrow><mrow><mi>T</mi></mrow></msub></math></span>). Concurrently, the inclusion of a metal strip at the drain-channel region raises the energy band and suppresses the ambipolar current. To optimize device performance, a comprehensive optimization phase involving material selection, length, and work function tuning of the metal strip is incorporated. Additionally, reliability concerns arising from interface trap charges (ITCs) at the oxide-semiconductor interface during fabrication are investigated. Through extensive simulations utilizing the Silvaco ATLAS device simulator, we demonstrate the enhanced immunity of the HM-MS-ED-JLTFET to various ITCs, rendering it more reliable for ultra-low-power and high-frequency applications compared to conventional counterparts like ED-JLTFET and MS-ED-JLTFET.</p></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":null,"pages":null},"PeriodicalIF":1.6000,"publicationDate":"2024-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Theoretical and simulation-based assessment of electrically doped junctionless TFET with metal-strip and hetero-material considering interface trap charges\",\"authors\":\"Bandi Venkata Chandan, Kaushal Kumar Nigam\",\"doi\":\"10.1016/j.microrel.2024.115393\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The fabrication complexity, ambipolar current conduction (<span><math><msub><mrow><mi>I</mi></mrow><mrow><mi>a</mi><mi>m</mi><mi>b</mi><mi>i</mi></mrow></msub></math></span>), inferior ON-state current (<span><math><msub><mrow><mi>I</mi></mrow><mrow><mi>o</mi><mi>n</mi></mrow></msub></math></span>), and poor analog/RF performance are major limitations of conventional tunnel field-effect transistors (TFETs). To address these challenges, we propose a novel approach utilizing hetero-material (HM) and metal-strip (MS) technology to develop an electrically doped junctionless TFET (HM-MS-ED-JL-TFET). Utilizing work function engineering (4.72 eV) at the control gate (CG) establishes an intrinsic region along the channel, while a combination of work function engineering (4.72 eV) and a polarity bias (electrically doped) of PG = -1.2 V at the polarity gate (PG) induces a <span><math><msup><mrow><mi>P</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span> region across the source, forming an <span><math><msup><mrow><mi>N</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span>-i-<span><math><msup><mrow><mi>P</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span> structure over the thin <span><math><msup><mrow><mi>N</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span>-<span><math><msup><mrow><mi>N</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span>-<span><math><msup><mrow><mi>N</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span> silicon body. This approach effectively mitigates concerns regarding random dopant fluctuations (RDF) without necessitating a thermal budget, streamlining fabrication compared to conventional TFETs. Furthermore, the integration of hetero-material into the source region narrows the tunneling barrier width, enhancing band-to-band tunneling at the source-channel interface and improving critical metrics such as ON-state current (<span><math><msub><mrow><mi>I</mi></mrow><mrow><mi>o</mi><mi>n</mi></mrow></msub></math></span>), subthreshold slope (SS), transconductance (<span><math><msub><mrow><mi>g</mi></mrow><mrow><mi>m</mi></mrow></msub></math></span>), and cut-off frequency (<span><math><msub><mrow><mi>f</mi></mrow><mrow><mi>T</mi></mrow></msub></math></span>). Concurrently, the inclusion of a metal strip at the drain-channel region raises the energy band and suppresses the ambipolar current. To optimize device performance, a comprehensive optimization phase involving material selection, length, and work function tuning of the metal strip is incorporated. Additionally, reliability concerns arising from interface trap charges (ITCs) at the oxide-semiconductor interface during fabrication are investigated. Through extensive simulations utilizing the Silvaco ATLAS device simulator, we demonstrate the enhanced immunity of the HM-MS-ED-JLTFET to various ITCs, rendering it more reliable for ultra-low-power and high-frequency applications compared to conventional counterparts like ED-JLTFET and MS-ED-JLTFET.</p></div>\",\"PeriodicalId\":51131,\"journal\":{\"name\":\"Microelectronics Reliability\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2024-04-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectronics Reliability\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0026271424000738\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronics Reliability","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0026271424000738","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Theoretical and simulation-based assessment of electrically doped junctionless TFET with metal-strip and hetero-material considering interface trap charges
The fabrication complexity, ambipolar current conduction (), inferior ON-state current (), and poor analog/RF performance are major limitations of conventional tunnel field-effect transistors (TFETs). To address these challenges, we propose a novel approach utilizing hetero-material (HM) and metal-strip (MS) technology to develop an electrically doped junctionless TFET (HM-MS-ED-JL-TFET). Utilizing work function engineering (4.72 eV) at the control gate (CG) establishes an intrinsic region along the channel, while a combination of work function engineering (4.72 eV) and a polarity bias (electrically doped) of PG = -1.2 V at the polarity gate (PG) induces a region across the source, forming an -i- structure over the thin -- silicon body. This approach effectively mitigates concerns regarding random dopant fluctuations (RDF) without necessitating a thermal budget, streamlining fabrication compared to conventional TFETs. Furthermore, the integration of hetero-material into the source region narrows the tunneling barrier width, enhancing band-to-band tunneling at the source-channel interface and improving critical metrics such as ON-state current (), subthreshold slope (SS), transconductance (), and cut-off frequency (). Concurrently, the inclusion of a metal strip at the drain-channel region raises the energy band and suppresses the ambipolar current. To optimize device performance, a comprehensive optimization phase involving material selection, length, and work function tuning of the metal strip is incorporated. Additionally, reliability concerns arising from interface trap charges (ITCs) at the oxide-semiconductor interface during fabrication are investigated. Through extensive simulations utilizing the Silvaco ATLAS device simulator, we demonstrate the enhanced immunity of the HM-MS-ED-JLTFET to various ITCs, rendering it more reliable for ultra-low-power and high-frequency applications compared to conventional counterparts like ED-JLTFET and MS-ED-JLTFET.
期刊介绍:
Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged.
Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.