Kunhui Xu , Xiaoli Tian , Wei Wei , Xinhua Wang , Yun Bai , Chengyue Yang , Yidan Tang , Chengzhan Li , Xinyu Liu , Hong Chen
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引用次数: 0
摘要
本文通过仿真结果和实际测试验证了 LJFET 对 SiC IGBT 传导特性影响的机理分析。为了验证趋势,我们制作并测试了具有不同 LJFET(包括 3.2 μm、10 μm 和 12 μm)的平面 p 沟道 SiC IGBT,测试结果与仿真结果相吻合。在相同条件下,当 LJFET 从 3 μm 增加到 10 μm 时,传导特性相对得到改善。此外,当 LJFET 从 10 μm 增大到 12 μm 时,正向压降变小。当栅极电压为 -20 V 时,电流密度为 100 A/cm2 的 p 沟道 SiC IGBT 的正向压降为 -10.20 V。
Impact of JFET width on conduction characteristic for p-channel SiC IGBT
In this article, the mechanism analysis of the impact of the LJFET on the conduction characteristic of SiC IGBT is verified through simulation results and actual tests. Planar p-channel SiC IGBTs with different LJFET including 3.2 μm, 10 μm, and 12 μm are fabricated and tested for trend verification, and test results are fit with simulation. Under the same conditions, when the LJFET increases from 3 μm to 10 μm, the conduction characteristic is relatively improved. Moreover, the forward voltage drop degenerates when the LJFET increases from 10 μm to 12 μm. When the gate voltage is −20 V, the forward voltage drop of the p-channel SiC IGBT at the current density of 100 A/cm2 is −10.20 V. At the same time, the breakdown voltage reaches 10 kV.
期刊介绍:
It is the aim of this journal to bring together in one publication outstanding papers reporting new and original work in the following areas: (1) applications of solid-state physics and technology to electronics and optoelectronics, including theory and device design; (2) optical, electrical, morphological characterization techniques and parameter extraction of devices; (3) fabrication of semiconductor devices, and also device-related materials growth, measurement and evaluation; (4) the physics and modeling of submicron and nanoscale microelectronic and optoelectronic devices, including processing, measurement, and performance evaluation; (5) applications of numerical methods to the modeling and simulation of solid-state devices and processes; and (6) nanoscale electronic and optoelectronic devices, photovoltaics, sensors, and MEMS based on semiconductor and alternative electronic materials; (7) synthesis and electrooptical properties of materials for novel devices.