Do-Kywn Kim , Dong-Seok Kim , Tae-Eon Kim , Min-Ju Kim , Seung Heon Shin
{"title":"低剂量至高剂量伽马射线(γ-射线)辐射对铟锌氧化物(IZO)薄膜晶体管(TFT)影响的研究","authors":"Do-Kywn Kim , Dong-Seok Kim , Tae-Eon Kim , Min-Ju Kim , Seung Heon Shin","doi":"10.1016/j.sse.2024.108884","DOIUrl":null,"url":null,"abstract":"<div><p>This paper investigates the impact of gamma-ray (γ-ray) radiation at doses of 100 krads and 1,000 krads on amorphous indium-zinc-oxide (IZO) thin-film transistors (TFTs). The IZO channel's properties are analyzed using X-ray photoelectron spectroscopy (XPS) before and after radiation. Following 100 krads exposure, the oxygen vacancy (V<sub>O</sub>) peak in the IZO channel increases from 41.8 % to 59.4 % due to the generation of electron-hole pairs. Additionally, the threshold voltage of the IZO TFT negatively shifts from 10.1 V to 5.5 V due to positive charges in the gate oxide layer. Following exposure to 1,000 krads gamma-ray radiation, the threshold voltage of 8.8 V is similar to that of 9.8 V for the non-irradiated TFT. Remarkably, the subthreshold swing (SS) remains unchanged, while the maximum transconductance (g<sub>m,max</sub>) is improved by 10.0 % and effective mobility (µ<sub>FE</sub>) by 6.1 %. These enhancements result from the diffusion of indium, zinc, and oxygen into the gate oxide layer thanks to the self-heating effect at a dose of 1,000 krads. Based on the results, our findings indicate the IZO TFT shows a significant potential for a radiation-hardness electronic device in harsh environments.</p></div>","PeriodicalId":21909,"journal":{"name":"Solid-state Electronics","volume":"215 ","pages":"Article 108884"},"PeriodicalIF":1.4000,"publicationDate":"2024-02-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of low to high-dose gamma-ray (γ-ray) radiation effects on indium-zinc-oxide (IZO) thin film transistor (TFT)\",\"authors\":\"Do-Kywn Kim , Dong-Seok Kim , Tae-Eon Kim , Min-Ju Kim , Seung Heon Shin\",\"doi\":\"10.1016/j.sse.2024.108884\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>This paper investigates the impact of gamma-ray (γ-ray) radiation at doses of 100 krads and 1,000 krads on amorphous indium-zinc-oxide (IZO) thin-film transistors (TFTs). The IZO channel's properties are analyzed using X-ray photoelectron spectroscopy (XPS) before and after radiation. Following 100 krads exposure, the oxygen vacancy (V<sub>O</sub>) peak in the IZO channel increases from 41.8 % to 59.4 % due to the generation of electron-hole pairs. Additionally, the threshold voltage of the IZO TFT negatively shifts from 10.1 V to 5.5 V due to positive charges in the gate oxide layer. Following exposure to 1,000 krads gamma-ray radiation, the threshold voltage of 8.8 V is similar to that of 9.8 V for the non-irradiated TFT. Remarkably, the subthreshold swing (SS) remains unchanged, while the maximum transconductance (g<sub>m,max</sub>) is improved by 10.0 % and effective mobility (µ<sub>FE</sub>) by 6.1 %. These enhancements result from the diffusion of indium, zinc, and oxygen into the gate oxide layer thanks to the self-heating effect at a dose of 1,000 krads. Based on the results, our findings indicate the IZO TFT shows a significant potential for a radiation-hardness electronic device in harsh environments.</p></div>\",\"PeriodicalId\":21909,\"journal\":{\"name\":\"Solid-state Electronics\",\"volume\":\"215 \",\"pages\":\"Article 108884\"},\"PeriodicalIF\":1.4000,\"publicationDate\":\"2024-02-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Solid-state Electronics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0038110124000339\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Solid-state Electronics","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0038110124000339","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Investigation of low to high-dose gamma-ray (γ-ray) radiation effects on indium-zinc-oxide (IZO) thin film transistor (TFT)
This paper investigates the impact of gamma-ray (γ-ray) radiation at doses of 100 krads and 1,000 krads on amorphous indium-zinc-oxide (IZO) thin-film transistors (TFTs). The IZO channel's properties are analyzed using X-ray photoelectron spectroscopy (XPS) before and after radiation. Following 100 krads exposure, the oxygen vacancy (VO) peak in the IZO channel increases from 41.8 % to 59.4 % due to the generation of electron-hole pairs. Additionally, the threshold voltage of the IZO TFT negatively shifts from 10.1 V to 5.5 V due to positive charges in the gate oxide layer. Following exposure to 1,000 krads gamma-ray radiation, the threshold voltage of 8.8 V is similar to that of 9.8 V for the non-irradiated TFT. Remarkably, the subthreshold swing (SS) remains unchanged, while the maximum transconductance (gm,max) is improved by 10.0 % and effective mobility (µFE) by 6.1 %. These enhancements result from the diffusion of indium, zinc, and oxygen into the gate oxide layer thanks to the self-heating effect at a dose of 1,000 krads. Based on the results, our findings indicate the IZO TFT shows a significant potential for a radiation-hardness electronic device in harsh environments.
期刊介绍:
It is the aim of this journal to bring together in one publication outstanding papers reporting new and original work in the following areas: (1) applications of solid-state physics and technology to electronics and optoelectronics, including theory and device design; (2) optical, electrical, morphological characterization techniques and parameter extraction of devices; (3) fabrication of semiconductor devices, and also device-related materials growth, measurement and evaluation; (4) the physics and modeling of submicron and nanoscale microelectronic and optoelectronic devices, including processing, measurement, and performance evaluation; (5) applications of numerical methods to the modeling and simulation of solid-state devices and processes; and (6) nanoscale electronic and optoelectronic devices, photovoltaics, sensors, and MEMS based on semiconductor and alternative electronic materials; (7) synthesis and electrooptical properties of materials for novel devices.