使用等离子 FIB-SEM 和 X 射线 CT 进行大体积三维重建的比较。

Microscopy (Oxford, England) Pub Date : 2024-07-30 DOI:10.1093/jmicro/dfae003

Ryuji Yoshida, Yasutoshi Mizuta, Takeharu Kato, Teiichi Kimura

{"title":"使用等离子 FIB-SEM 和 X 射线 CT 进行大体积三维重建的比较。","authors":"Ryuji Yoshida, Yasutoshi Mizuta, Takeharu Kato, Teiichi Kimura","doi":"10.1093/jmicro/dfae003","DOIUrl":null,"url":null,"abstract":"We demonstrated large-volume three-dimensional (3D) reconstruction using plasma-focused ion beam-scanning electron microscopy (PFIB-SEM). We successfully reconstructed a 750 μm (W) × 143 μm (H) × 310 μm (D) volume at a resolution of 200 nm/pix from 1550 SEM backscattered electron images of a Li-ion battery cathode sheet. The PFIB-SEM system was found to be capable of acquiring and reconstructing larger volume 3D datasets than X-ray computed tomography, and with higher resolution and contrast.","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"354-357"},"PeriodicalIF":0.0000,"publicationDate":"2024-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Comparison of large-volume 3D reconstruction using plasma FIB-SEM and X-ray CT.\",\"authors\":\"Ryuji Yoshida, Yasutoshi Mizuta, Takeharu Kato, Teiichi Kimura\",\"doi\":\"10.1093/jmicro/dfae003\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We demonstrated large-volume three-dimensional (3D) reconstruction using plasma-focused ion beam-scanning electron microscopy (PFIB-SEM). We successfully reconstructed a 750 μm (W) × 143 μm (H) × 310 μm (D) volume at a resolution of 200 nm/pix from 1550 SEM backscattered electron images of a Li-ion battery cathode sheet. The PFIB-SEM system was found to be capable of acquiring and reconstructing larger volume 3D datasets than X-ray computed tomography, and with higher resolution and contrast.\",\"PeriodicalId\":74193,\"journal\":{\"name\":\"Microscopy (Oxford, England)\",\"volume\":\" \",\"pages\":\"354-357\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-07-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microscopy (Oxford, England)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1093/jmicro/dfae003\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microscopy (Oxford, England)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1093/jmicro/dfae003","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

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摘要

我们利用等离子体聚焦离子束-扫描电子显微镜（PFIB-SEM）演示了大体积三维（3D）重建。我们从 1550 张锂离子电池正极片的扫描电子显微镜反向散射电子图像中成功地重建了 750 μm（宽）×143 μm（高）×310 μm（深）的体积，分辨率为 200 nm/pix。与 X 射线计算机断层扫描相比，PFIB-SEM 系统能够获取和重建更大体积的三维数据集，并且具有更高的分辨率和对比度。

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Comparison of large-volume 3D reconstruction using plasma FIB-SEM and X-ray CT.

We demonstrated large-volume three-dimensional (3D) reconstruction using plasma-focused ion beam-scanning electron microscopy (PFIB-SEM). We successfully reconstructed a 750 μm (W) × 143 μm (H) × 310 μm (D) volume at a resolution of 200 nm/pix from 1550 SEM backscattered electron images of a Li-ion battery cathode sheet. The PFIB-SEM system was found to be capable of acquiring and reconstructing larger volume 3D datasets than X-ray computed tomography, and with higher resolution and contrast.

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Microscopy (Oxford, England)

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