{"title":"特邀嘉宾评论:3D半导体计量","authors":"Ndubuisi George Orji, Qinghuang Lin","doi":"10.1117/1.jmm.22.3.031201","DOIUrl":null,"url":null,"abstract":"The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.","PeriodicalId":499761,"journal":{"name":"Journal of micro/nanopatterning, materials, and metrology","volume":"94 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-08-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Special Section Guest Editorial: 3D Semiconductor Metrology\",\"authors\":\"Ndubuisi George Orji, Qinghuang Lin\",\"doi\":\"10.1117/1.jmm.22.3.031201\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.\",\"PeriodicalId\":499761,\"journal\":{\"name\":\"Journal of micro/nanopatterning, materials, and metrology\",\"volume\":\"94 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-08-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of micro/nanopatterning, materials, and metrology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/1.jmm.22.3.031201\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of micro/nanopatterning, materials, and metrology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/1.jmm.22.3.031201","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Special Section Guest Editorial: 3D Semiconductor Metrology
The Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
