Journal of micro/nanopatterning, materials, and metrology

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Journal of micro/nanopatterning, materials, and metrology - 最新文献

Study of electron-induced chemical transformations in polymers

Pub Date : 2024-07-16 DOI: 10.1117/1.jmm.23.4.041403 Maximillian Mueller, Terry R. McAfee, Patrick Naulleau, Dahyun Oh, Oleg Kostko

Spectral reflectometry characterization of an extreme ultraviolet attenuated phase-shifting mask blank

Pub Date : 2024-07-12 DOI: 10.1117/1.jmm.23.4.041402 Tao Shen, I. Mochi, Dongmin Jeong, Elisabeth Mueller, Paolo Ansuinelli, Jinho Ahn, Yasin Ekinci

Nonchemically amplified molecular resist based on multi-sulfonium modified triptycene for electron beam and extreme ultraviolet lithography

Pub Date : 2024-07-11 DOI: 10.1117/1.jmm.23.3.034601 Xiaodong Yuan, Jinping Chen, Tianjun Yu, Yi Zeng, Xudong Guo, Shuangqing Wang, Rui-bo Hu, Peng Tian, M. Vockenhuber, D. Kazazis, Yasin Ekinci, Jun Zhao, Yanqing Wu, Guoqiang Yang, Yi Li

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