快速重离子辐照诱导InSb中离子径迹形成及孔隙度

IF 2.4 3区材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS

Journal of Vacuum Science & Technology A Pub Date : 2023-10-03 DOI:10.1116/6.0003007

Taleb Alwadi, Christian Notthoff, Shankar Dutt, Jessica Wierbik, Nahid Afrin, Alexander Kiy, Patrick Kluth

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引用次数: 0

摘要

研究了185mev (197Au)快速重离子辐照后InSb中离子径迹形成、辐照致损伤(非晶化)和孔隙形成与离子通量和辐照角的关系。通道几何的卢瑟福后向散射光谱显示，在30°和60°方向上，离子轨道半径为21 nm，而在正向照射下，离子轨道半径约为16 nm。横断面扫描电镜显示，当对表面进行非正常照射时，孔隙度显著增加。非正常辐照表明，相对于表面法线，孔隙的优先取向约为45°。此外，在相同的条件下，InSb样品与GaSb散装样品相比显着表现出更高的膨胀。

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Ion track formation and porosity in InSb induced by swift heavy ion irradiation

Ion track formation, irradiation-induced damage (amorphization), and the formation of porosity in InSb after 185 MeV 197Au swift heavy ion irradiation are studied as a function of ion fluence and irradiation angle. Rutherford backscattering spectrometry in channeling geometry reveals an ion track radius of about 16 nm for irradiation normal to the surface and 21 nm for off-normal irradiation at 30° and 60°. Cross-sectional scanning electron microscopy shows significant porosity that increases when irradiation was performed off-normal to the surface. Off-normal irradiation shows a preferential orientation of the pores at about 45° relative to the surface normal. Moreover, when subjected to identical conditions, InSb samples demonstrate notably higher swelling compared to GaSb bulk samples.

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来源期刊

Journal of Vacuum Science & Technology A 工程技术-材料科学：膜

CiteScore

5.10

自引率

10.30%

发文量

247

审稿时长

2.1 months

期刊介绍： Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.