{"title":"氧等离子体处理TeO2-B2O3(硼碲酸盐)薄膜","authors":"Uğur Demirkol, Çağrı Durmuş, Tamer Akan","doi":"10.1116/6.0002879","DOIUrl":null,"url":null,"abstract":"In this study, boro-tellurite glasses with a composition of 75TeO2–25B2O3 (mol. %) (TB) were synthesized using a traditional melt-quenching method. The glasses were subsequently deposited as thin films using the thermionic vacuum arc system, and a subset of the samples underwent treatment with a low-pressure cold oxygen plasma system, resulting in the formation of the “TBO (boro-tellurite treated by oxygen plasma)” thin films. The structural and morphological properties of the TB and TBO thin films were characterized using x-ray diffraction analysis, x-ray photoelectron spectroscopy, Raman spectroscopy, field emission scanning electron microscopy, and atomic force microscopy. The optical properties of the thin film samples were evaluated using ultraviolet–visible spectrophotometry in the range of 300–800 nm. The resistivity of the thin films was measured using the four-probe Van der Pauw method. It was found that the TB thin films had an amorphous structure with some crystalline formations, whereas the TBO thin films were similar to the bulk boro-tellurite glasses described in the literature, with no detectable crystalline formations. Both TB and TBO thin films exhibited homogenous and amorphous surfaces. Furthermore, the electronic structure of the thin films has changed after oxygen plasma treatment.","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":null,"pages":null},"PeriodicalIF":2.4000,"publicationDate":"2023-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Oxygen plasma treatment of TeO2—B2O3 (boro-tellurite) thin films\",\"authors\":\"Uğur Demirkol, Çağrı Durmuş, Tamer Akan\",\"doi\":\"10.1116/6.0002879\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, boro-tellurite glasses with a composition of 75TeO2–25B2O3 (mol. %) (TB) were synthesized using a traditional melt-quenching method. The glasses were subsequently deposited as thin films using the thermionic vacuum arc system, and a subset of the samples underwent treatment with a low-pressure cold oxygen plasma system, resulting in the formation of the “TBO (boro-tellurite treated by oxygen plasma)” thin films. The structural and morphological properties of the TB and TBO thin films were characterized using x-ray diffraction analysis, x-ray photoelectron spectroscopy, Raman spectroscopy, field emission scanning electron microscopy, and atomic force microscopy. The optical properties of the thin film samples were evaluated using ultraviolet–visible spectrophotometry in the range of 300–800 nm. The resistivity of the thin films was measured using the four-probe Van der Pauw method. It was found that the TB thin films had an amorphous structure with some crystalline formations, whereas the TBO thin films were similar to the bulk boro-tellurite glasses described in the literature, with no detectable crystalline formations. Both TB and TBO thin films exhibited homogenous and amorphous surfaces. Furthermore, the electronic structure of the thin films has changed after oxygen plasma treatment.\",\"PeriodicalId\":17490,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology A\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.4000,\"publicationDate\":\"2023-10-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology A\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0002879\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, COATINGS & FILMS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0002879","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}
Oxygen plasma treatment of TeO2—B2O3 (boro-tellurite) thin films
In this study, boro-tellurite glasses with a composition of 75TeO2–25B2O3 (mol. %) (TB) were synthesized using a traditional melt-quenching method. The glasses were subsequently deposited as thin films using the thermionic vacuum arc system, and a subset of the samples underwent treatment with a low-pressure cold oxygen plasma system, resulting in the formation of the “TBO (boro-tellurite treated by oxygen plasma)” thin films. The structural and morphological properties of the TB and TBO thin films were characterized using x-ray diffraction analysis, x-ray photoelectron spectroscopy, Raman spectroscopy, field emission scanning electron microscopy, and atomic force microscopy. The optical properties of the thin film samples were evaluated using ultraviolet–visible spectrophotometry in the range of 300–800 nm. The resistivity of the thin films was measured using the four-probe Van der Pauw method. It was found that the TB thin films had an amorphous structure with some crystalline formations, whereas the TBO thin films were similar to the bulk boro-tellurite glasses described in the literature, with no detectable crystalline formations. Both TB and TBO thin films exhibited homogenous and amorphous surfaces. Furthermore, the electronic structure of the thin films has changed after oxygen plasma treatment.
期刊介绍:
Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.