脉冲直流反应磁控溅射沉积NiO薄膜的生长和光学性能

IF 2.4 3区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS
Faezeh A. F. Lahiji, Samiran Bairagi, Roger Magnusson, Mauricio A. Sortica, Daniel Primetzhofer, Erik Ekström, Biplab Paul, Arnaud le Febvrier, Per Eklund
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引用次数: 0

摘要

采用脉冲直流反应磁控溅射技术,在300℃的衬底温度下,在Si(100)和C - al2o3上生长出不同氧含量的NiO薄膜。我们表征了NiO的结构和光学性质随氧含量的变化。在两种衬底上均发现了立方结构、单相和沿(111)取向的NiO。x射线衍射和极图分析进一步表明,NiO在Si(100)衬底上呈现出纤维织构生长,而c-Al2O3则实现了双畴外延,并与NiO(111)∥Al2O3(0001)和NiO[11¯0]∥Al2O3[101¯0]或NiO[1¯10]∥Al2O3[21¯1¯0]形成外延关系。氧含量对NiO薄膜的折射率、消光系数和吸收系数没有显著影响。这表明NiO薄膜的光学性质不受氧含量变化的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering
NiO thin films with varied oxygen contents are grown on Si(100) and c-Al2O3 at a substrate temperature of 300 °C using pulsed dc reactive magnetron sputtering. We characterize the structure and optical properties of NiO changes as functions of the oxygen content. NiO with the cubic structure, single phase, and predominant orientation along (111) is found on both substrates. X-ray diffraction and pole figure analysis further show that NiO on the Si(100) substrate exhibits fiber-textured growth, while twin domain epitaxy was achieved on c-Al2O3, with NiO(111)∥Al2O3(0001) and NiO[11¯0]∥Al2O3[101¯0] or NiO[1¯10]∥Al2O3[21¯1¯0] epitaxial relationship. The oxygen content in NiO films did not have a significant effect on the refractive index, extinction coefficient, and absorption coefficient. This suggests that the optical properties of NiO films remained unaffected by changes in the oxygen content.
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来源期刊
Journal of Vacuum Science & Technology A
Journal of Vacuum Science & Technology A 工程技术-材料科学:膜
CiteScore
5.10
自引率
10.30%
发文量
247
审稿时长
2.1 months
期刊介绍: Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.
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