使用电子表格计算教学真空技术

Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488) Pub Date : 2003-09-04 DOI:10.1109/UGIM.2003.1225757

R. E. Pearson, G. Atkinson

{"title":"使用电子表格计算教学真空技术","authors":"R. E. Pearson, G. Atkinson","doi":"10.1109/UGIM.2003.1225757","DOIUrl":null,"url":null,"abstract":"Vacuum technology is an important part of nano-fabrication. Automated control systems for vacuum equipment have made operation easy and safe but have also isolated the user from the need to understand the physics of vacuum systems. In spite of this, many equipment and process decisions revolve around choices made concerning the vacuum components of a processing tool. Students can use a spreadsheet to calculate the pump down pressure characteristic in a chamber for various non ideal conditions and combinations of single and multiple stage pumps. The calculations can be compared to characteristics of real pump/chamber systems that are available in the user's laboratory. This develops a much deeper understanding of the design and operation of modern vacuum systems. The calculations are also a good way to introduce or review numerical techniques.","PeriodicalId":356452,"journal":{"name":"Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Teaching vacuum technology using spreadsheet calculations\",\"authors\":\"R. E. Pearson, G. Atkinson\",\"doi\":\"10.1109/UGIM.2003.1225757\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Vacuum technology is an important part of nano-fabrication. Automated control systems for vacuum equipment have made operation easy and safe but have also isolated the user from the need to understand the physics of vacuum systems. In spite of this, many equipment and process decisions revolve around choices made concerning the vacuum components of a processing tool. Students can use a spreadsheet to calculate the pump down pressure characteristic in a chamber for various non ideal conditions and combinations of single and multiple stage pumps. The calculations can be compared to characteristics of real pump/chamber systems that are available in the user's laboratory. This develops a much deeper understanding of the design and operation of modern vacuum systems. The calculations are also a good way to introduce or review numerical techniques.\",\"PeriodicalId\":356452,\"journal\":{\"name\":\"Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)\",\"volume\":\"14 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-09-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/UGIM.2003.1225757\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UGIM.2003.1225757","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

真空技术是纳米加工的重要组成部分。真空设备的自动化控制系统使操作变得简单和安全，但也使用户不需要了解真空系统的物理特性。尽管如此，许多设备和工艺决策都围绕着加工工具的真空组件的选择。学生可以使用电子表格来计算各种非理想条件下的泵下压力特性，以及单级和多级泵的组合。计算可以与用户实验室中可用的实际泵/腔室系统的特性进行比较。这使我们对现代真空系统的设计和操作有了更深入的了解。计算也是介绍或复习数值技术的好方法。

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Teaching vacuum technology using spreadsheet calculations

Vacuum technology is an important part of nano-fabrication. Automated control systems for vacuum equipment have made operation easy and safe but have also isolated the user from the need to understand the physics of vacuum systems. In spite of this, many equipment and process decisions revolve around choices made concerning the vacuum components of a processing tool. Students can use a spreadsheet to calculate the pump down pressure characteristic in a chamber for various non ideal conditions and combinations of single and multiple stage pumps. The calculations can be compared to characteristics of real pump/chamber systems that are available in the user's laboratory. This develops a much deeper understanding of the design and operation of modern vacuum systems. The calculations are also a good way to introduce or review numerical techniques.

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Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)

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