MEMS/NEMS开关的可靠性与失效分析

2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Pub Date : 2016-07-18 DOI:10.1109/IPFA.2016.7564328

Chengkuo Lee

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引用次数: 4

摘要

微机电系统(MEMS)和纳米机电系统(NEMS)器件目前在许多地方得到了广泛的应用。当它们在恶劣环境中使用时，可靠性仍然是一个巨大的挑战，因为这些设备暴露在灾难性的压力，温度，辐射等水平，而MEMS和NEMS中有独立的结构和可移动部件。在这次特邀演讲中，首先讨论了MEMS和NEMS的一般可靠性相关问题。对MEMS/NEMS开关的可靠性和失效分析进行了实验研究。

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Reliability and failure analysis of MEMS/NEMS switches

Microelectromechnical system (MEMS) and nanoelectromechanical system (NEMS) devices have widely deployed in many places now. When they are used in harsh environment, reliability remains as a grand challenge because these devices are exposed to catastrophic level of pressure, temperature, radiation and so on, while there are free-standing structures and movable parts in MEMS and NEMS. In this invited talk, general reliability related concerns of MEMS and NEMS are discussed first. MEMS/NEMS switches are experimentally investigated in terms of reliability and failure analysis.

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2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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