有机层压板三维集成有源电路的制造问题

E. Jung, D. Wojakowski, A. Neumann, A. Ostmann, R. Aschenbrenner, H. Reichl
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引用次数: 0

摘要

有源电路的三维集成,薄或标准厚度,到聚合物基板挑战目前的基板制造工艺以前所未有的方式。为了克服与这种3D集成技术相关的风险,必须仔细研究和评估这些问题。为了将超薄芯片直接集成到多层印刷电路板的介电层中,我们发现了这些问题,并使用先进的pcb制造方法进行了测试。在制造环境中遇到的风险中,材料选择(i) 18/spl倍/12”板上的线性公差(ii)超薄骰子的放置(iii)层压工艺(iv)通过形成激光/等离子体(v)化学沉积种子层(vi)接触结构的图案(vii)观察到测试电压是影响结果的因素,并将进行讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Manufacturing issues for 3D integrated active circuits into organic laminate substrates
The three dimensional integration of active circuits, thinned or in standard thickness, into polymeric substrates challenges current substrate manufacturing processes in an unprecedented way. In order to overcome the risks associated with this 3D integration technology, the issues must be carefully studied and assessed. For the direct integration of ultrathin chips into dielectric build up layers of multi-layer printed circuit boards, such issues were identified and put to the test using advanced pcb manufacturing methods. Among the risks encountered in a manufacturing ambient Material selection (i)linear tolerance on a 18/spl times/12" board (ii)placement of ultrathin dice (iii)lamination process (iv)laser/plasma via formation (v)electroless deposition of seed layer (vi)patterning of the contact structures (vii)testing voltages were observed to be the ones affecting the outcome and will be discussed.
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