基于激光超声信号小波分析的倒装焊点缺陷检测

Jin Yang, Lizheng Zhang, I. C. Ume
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引用次数: 9

摘要

一种新型激光超声和干涉仪检测系统已成功地用于检测倒装芯片、芯片规模封装和芯片电容器中的互连缺陷,包括缺失、错位、打开和裂纹焊点。本文提出了超声振动信号的小波分析方法,并与以往的方法进行了比较,包括误差率和相关系数。小波分析提高了对倒装芯片焊点缺陷检测的灵敏度。讨论了该系统的通用性,用于检测由共晶和无铅材料制成的倒装芯片焊点。结果表明,小波分析是超声振动信号处理的有力工具。小波分析具有实时处理的能力,可以提高在线评价的效率。完全开发的系统可以在线使用,并作为电子封装制造过程中凸点互连的实时检测工具。可以得出结论,所开发的系统能够对锡铅和无铅材料制成的焊点进行质量检测
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Defect detection of flip chip solder bump with wavelet analysis of laser ultrasound signals
A novel laser ultrasound and interferometer inspection system has been successfully applied to detect interconnection defects including missing, misaligned, open, and cracked solder bumps in flip chips, chip scale packages and chip capacitors. In this paper, wavelet analysis of ultrasound vibration signals is presented and compared to previous methods, including error ratio and correlation coefficient. Wavelet analysis increases the sensitivity to defect detection of flip chip solder bumps. The versatility of the system for inspecting flip chips solder joints made from eutectic and lead-free materials is discussed. The results show that wavelet analysis is a strong tool for ultrasound vibration signal processing. Wavelet analysis has the capability for real-time processing and can improve the efficiency of on-line evaluation. The fully developed system can be used online and serve as a real-time inspection tool for solder bump interconnections in the manufacturing process of electronic packages. It can be concluded that the developed system is capable for quality inspection of solder bumps made from tin-lead and lead-free materials
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