结合电极的MEMS振动驻极体能量采集器

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI:10.1109/MEMSYS.2014.6765663

Q. Fu, Yuji Suzuki

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引用次数: 19

摘要

提出了一种新型的平面内MEMS驻极体能量采集器，该采集器采用重叠变面积和闭合变换器相结合的电极，可在低和高振动加速度下获得大输出功率。一个早期的原型已经成功地用单层绝缘体上硅工艺微制造。采用软x射线充电在梳子指侧壁的垂直驻极体上建立约60 V的均匀表面电位。得到了最高1.6 μW的输出功率，效率高达57%。

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MEMS vibration electret energy harvester with combined electrodes

A novel in-plane MEMS electret energy harvester with combined electrodes of overlapping-area-change and gap-closing converters is proposed for large output power both at low and high vibration accelerations. An early prototype has been successfully micro-fabricated with the single layer silicon-on-insulator process. Soft X-ray charging is employed to establish uniform surface potential around 60 V on vertical electrets on the sidewall of the comb fingers. Up to 1.6 μW output power has been obtained, which corresponds to the effectiveness as high as 57%.

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来源期刊

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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