相变材料高温导热系数3ω测量方法的优化

2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) Pub Date : 2019-03-01 DOI:10.1109/ICMTS.2019.8730993

A. Serra, G. Bourgeois, M. Cyrille, J. Cluzel, J. Garrione, G. Navarro, E. Nowak

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引用次数: 0

摘要

本文通过“3ω法”研究了富锗锗sb - te相变材料(GGST)在高达$400\ ^{\circ}\ mathm {C}$温度下的导热系数(kth)。本文介绍了试验车辆的工程设计，并对金属基加热器进行了优化，使其在高温下也能实现可靠的测量。最后，我们比较了四种不同方法的结果，表明哪种方法对相变材料的第k次评价更准确。

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Optimization of 3ω Method for Phase-Change Materials Thermal Conductivity Measurement at High Temperature

Thermal conductivity (kth) of Ge-rich Ge-Sb-Te phase-change material (GGST) is here investigated at temperatures up to $400\ ^{\circ}\mathrm{C}$ through “3ω method”. We present the engineering of the test vehicle, with the optimization of the metal-based heater to achieve a reliable measurement even at high temperature. Finally, we compare the results from four different approaches, showing which method is more accurate for the kth evaluation in phase-change materials.

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2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)

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