一种用于扇出的混合面板嵌入工艺

J. Hunt, Kidd Lee, P. Shih, J. Lin
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引用次数: 10

摘要

随着技术节点的进步,芯片尺寸缩小,WLCSP芯片的面积变得太小,无法容纳芯片I/O所需的所有焊接球。解决这个问题的一种方法是扇出晶圆级封装(FOWLP),它已经量产了三年多。然而,这些都是晶圆工艺,使用200毫米或300毫米的重构模制晶圆,并且通常与其他传统封装相比没有成本竞争力。需要一种成本较低的解决方案来分散类似于FOWLP结构的小芯片的I/O。我们已经开发了一个面板流程,它使用类似的简单的单个再分发层(RDL)来完成扇出功能,以补充FOWLP解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A hybrid panel embedding process for fanout
As die sizes shrink with technology node advances, the area of WLCSP dice is becoming too small to accommodate all of the solder balls required for the dice I/O. One solution to this problem has been Fan Out Wafer Level Packages (FOWLP), which have been in volume production for over three years. However, these are Wafer processes, performed with either 200mm or 300mm reconstituted molded wafers, and are often not cost competitive with other traditional packages. A lower cost solution is needed to use for fanning out the I/O of small die that approximates the structure of the FOWLP. We have developed a panel process that uses a similar simple single Redistribution Layer (RDL) for the fan out function that complements the FOWLP solution.
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