扭转变矩器可靠性分析

2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits Pub Date : 2007-07-11 DOI:10.1109/IPFA.2007.4378069

C. Venkatesh, N. Bhat

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引用次数: 0

摘要

C. Venkatesh et al.(2005)提出了一种具有宽动态范围、低驱动电压和驱动电压与信号电压隔离的扭转MEMS变容器。本文研究了拉入、残余应力和连续循环对扭转MEMS变容器性能的影响。

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Reliability Analysis of Torsional Varactor

A torsional MEMS varactor with wide dynamic range, lower actuation voltage and isolation between actuation voltage and signal voltage has been proposed in C. Venkatesh et al. (2005). In this paper we address the effects of pull-in, residual stress and continuous cycling on the performance of torsional MEMS varactor.

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来源期刊

2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits

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