电迁移分析的原子法

H. Ceric, R. L. de Orio, W. Zisser, S. Selberherr
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引用次数: 0

摘要

现代集成电路中互连的可靠性是由电迁移有效价的大小和方向决定的。有效价取决于局部原子构型。为了在原子水平上研究电磁,必须应用从头算方法。本文提出了一种从头计算电迁移有效价的新方法,并介绍了该方法在电迁移行为分析中的应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Atomistic method for analysis of electromigration
The reliability of interconnects in modern integrated circuits is determined by the magnitude and direction of the effective valence for electromigration (EM). The effective valence depends on local atomistic configurations. In order to study EM on atomistic level an application of ab initio methods is a necessity. In this work a novel method for an ab initio calculation of the effective valence for electromigration is proposed and its application on the analysis of EM behavior is presented.
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