2012 IEEE International Interconnect Technology Conference

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2012 IEEE International Interconnect Technology Conference - 最新文献

Tungsten plug corrosion on B2H6-based nucleation layer induced by WCMP process

Pub Date : 2012-06-04 DOI: 10.1109/IITC.2012.6251649 Kuang-Wei Chen, Meng-Tsung Ko, Chun-Fu Chen, Yung-tai Hung, Chin-Ta Su, Tahone Yang, Kuang-Chao Chen, Chih-Yuan Lu

Multi-layer graphene wire grown by annealing sputtered amorphous carbon

Pub Date : 2012-06-04 DOI: 10.1109/IITC.2012.6251671 M. Sato, M. Takahashi, H. Nakano, T. Murakami, A. Kawabata, M. Nihei, N. Yokoyama

Successful recovery of moisture-induced TDDB degradation for Cu/ULK(k=2.5) BEOL interconnect

Pub Date : 2012-06-04 DOI: 10.1109/IITC.2012.6251653 S. Ahn, Tae-Soo Kim, V. H. Nguyen, OkHee Park, K. Han, Jang-Hee Lee, Jongmyeong Lee, Gilheyun Choi, Ho-Kyu Kang, C. Chung

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