M. Sato, M. Takahashi, H. Nakano, T. Murakami, A. Kawabata, M. Nihei, N. Yokoyama
{"title":"Multi-layer graphene wire grown by annealing sputtered amorphous carbon","authors":"M. Sato, M. Takahashi, H. Nakano, T. Murakami, A. Kawabata, M. Nihei, N. Yokoyama","doi":"10.1109/IITC.2012.6251671","DOIUrl":null,"url":null,"abstract":"We have fabricated multi-layer graphene directly on SiO2 by annealing sputtered amorphous carbon with a Co catalyst without use of complicated transfer processes. Structural analysis revealed that the graphene sheets formed an epitaxial structure, aligned to the Co (111) surface. An MLG wire can sustain a high current density of 107 A/cm2 which is over one order of magnitude higher than that of a Cu wire.","PeriodicalId":165741,"journal":{"name":"2012 IEEE International Interconnect Technology Conference","volume":"308 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-06-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE International Interconnect Technology Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC.2012.6251671","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We have fabricated multi-layer graphene directly on SiO2 by annealing sputtered amorphous carbon with a Co catalyst without use of complicated transfer processes. Structural analysis revealed that the graphene sheets formed an epitaxial structure, aligned to the Co (111) surface. An MLG wire can sustain a high current density of 107 A/cm2 which is over one order of magnitude higher than that of a Cu wire.