M. Daneman, Norman C. Tien, Olav Solgaard, A. Pisano, Kam Y. Lau, Richard S. Muller
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Linear microvibromotor for positioning optical components
We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. This device is developed for use in actuated micro-optical systems on silicon. Its submicron positioning resolution and a travel range of over 350 /spl mu/m are excellent properties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation of the vibromotor dynamics is presented to explore optimization and control issues for this device.
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