试纸粘滞问题的改进历程

Euclea Cheah Wuan Ning
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引用次数: 0

摘要

在一次偏移中,相当多的材料受到粘滞问题的影响,导致产量下降0.10%。这种偏移是由于UV胶带和设备之间存在牢固的结合而引起的,这使得设备在磁带和卷轴过程中不可分离。该研究包括分析粘接层的根本原因,以及采取措施处理受影响的材料和改进措施,以使新的UV胶带不存在粘接问题。在进行了彻底的质量分析后,确定了一种替代工艺来清除受影响的材料。通过对两种UV胶带的收率和DPPM的比较来衡量新型UV胶带的性能,并讨论了通过对粘接装置的替代工艺进行鉴定所实现的节约。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Improvement journey of strip test sticky issue
Quite number of material was affected with sticky issue in an excursion which contributed to 0.10% yield drop. This excursion was caused by the presence of a strong bond between the UV tape and the device which made the device inseparable for tape and reel process. The study involves analysis of the root cause of the bonding layer as well as the measures taken to deal with the affected material and improvement actions done to qualify a new UV tape which does not have sticky issue. An alternate process was qualified to clear the affected material after thorough quality analysis was made. The yield and DPPM comparison of the UV tapes are taken into consideration to gauge the performance of the new UV tape while saving realized through qualification of the alternate process for sticky devices were discussed.
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