用于MCM生产的裸芯片堆叠结构

T. Kimura, O. Okuda, H. Ishikawa, Y. Suzuki, C.R. Hodges, P. Kim, K. Nakajima
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引用次数: 1

摘要

为了获得更高密度和更低成本的多芯片模块(MCM),我们开发了一种结构简单的裸晶片堆叠组装技术。它提供了一个简单的结构与厚环氧层固定上层裸模,而不是定制结构,如缺口模具或在模具边缘增加电极的传统结构。所开发的技术可以使用与线键合互连完全相同的模具,而无需任何额外的加工。上下模具的所有电气连接都是通过电线连接到基板上实现的。我们通过精确控制环氧层厚度和线圈形状来完成这种堆叠组装。这项新技术被应用于mcm的生产,包括12个内存芯片。装配后的MCM的密度几乎是没有叠层结构的MCM的两倍。验证MCM功能正常。该结构的MCM装配成品率足够高,可用于生产。由于我们的技术包括对失效模具的修复方法,因此不需要完全测试KGD(已知的好模具)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Bare chip stacking structure for MCM production
In order to obtain higher density and lower cost multichip modules (MCM), we have developed a simply structured bare-die stacking assembly technology. It provides a simple structure with thick epoxy layer to fix upper layer bare die, rather than custom structures such as notched dies or additional electrodes at die edge in the conventional structures. The developed technology can use exactly the same dies as those for wire bonding interconnection without any additional processing. All electrical connections of the upper and lower dies are achieved by wire-bonding to the substrate independently. We have performed this stacking assembly by precise control of epoxy layer thickness and wire loop shapes. This new technology was applied to the production of MCMs, including twelve memory dies. The assembled MCM was almost twice as dense as an MCM without a stacked-die structure. The MCM were verified to functional correctly. The assembly yield of MCM with this structure was high enough for production. As our technology includes a repair method for failed dies, fully tested KGD (known good die) are not necessary.
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