TSV缺陷和TSV引起的电路故障:测试和为测试而设计的第三维度

K. Chakrabarty, Sergej Deutsch, Himanshu Thapliyal, Fangming Ye
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引用次数: 62

摘要

基于硅通孔(tsv)的3D集成电路(3D IC)已经成为克服集成电路设计中互连和功率瓶颈的一种有前途的解决方案。然而,3D集成电路的测试仍然是一个重大挑战,需要在测试技术上取得突破,使3D集成在商业上可行。本文首先概述了与tsv相关的缺陷,以及tsv在器件和互连中以新缺陷的形式产生的影响。接下来,本文介绍了3D集成电路在测试、诊断和可测试性设计方面的最新进展,以及使用冗余和修复的缺陷容限技术。涵盖的主题包括各种类型的TSV缺陷,器件中的应力诱导迁移和阈值电压变化,互连中的应力诱导电迁移,预键和测试键测试(包括TSV探测),以及缺陷容限的优化技术。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
TSV defects and TSV-induced circuit failures: The third dimension in test and design-for-test
3D integrated circuits (3D ICs) based on through-silicon vias (TSVs) have emerged as a promising solution for overcoming interconnect and power bottlenecks in IC design. However, testing of 3D ICs remains a significant challenge, and breakthroughs in test technology are needed to make 3D integration commercially viable. This paper first presents an overview of TSV-related defects and the impact of TSVs in the form of new defects in devices and interconnects. The paper next describes recent advances in testing, diagnosis, and design-for-testability for 3D ICs and techniques for defect tolerance using redundancy and repair. Topics covered include various types of TSV defects, stress-induced mobility and threshold-voltage variation in devices, stress-induced electromigration in inter-connects, pre-bond and test-bond testing (including TSV probing), and optimization techniques for defect tolerance.
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