A. Orii, M. Suizu, S. Amakawa, K. Katayama, K. Takano, M. Motoyoshi, T. Yoshida, M. Fujishima
{"title":"110 GHz以上硅衬底上TRL脱嵌的THRU长度标准","authors":"A. Orii, M. Suizu, S. Amakawa, K. Katayama, K. Takano, M. Motoyoshi, T. Yoshida, M. Fujishima","doi":"10.1109/ICMTS.2013.6528150","DOIUrl":null,"url":null,"abstract":"It is known that the THRU standard (a transmission line) used for thru-reflect-line (TRL) calibration/de-embedding for S-parameter measurement has to be long enough that only a single electromagnetic mode propagates at its center for it to work reliably. But ideally, TRL standards should occupy as little precious silicon real estate as possible. This paper attempts to experimentally find out how long a THRU is long enough above 110GHz up to 170 GHz through measurements of transmission lines of various lengths. The results indicate that the length of a THRU should be at least 400 micrometers, excluding pads and pad-to-line transitions.","PeriodicalId":142589,"journal":{"name":"2013 IEEE International Conference on Microelectronic Test Structures (ICMTS)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"15","resultStr":"{\"title\":\"On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz\",\"authors\":\"A. Orii, M. Suizu, S. Amakawa, K. Katayama, K. Takano, M. Motoyoshi, T. Yoshida, M. Fujishima\",\"doi\":\"10.1109/ICMTS.2013.6528150\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"It is known that the THRU standard (a transmission line) used for thru-reflect-line (TRL) calibration/de-embedding for S-parameter measurement has to be long enough that only a single electromagnetic mode propagates at its center for it to work reliably. But ideally, TRL standards should occupy as little precious silicon real estate as possible. This paper attempts to experimentally find out how long a THRU is long enough above 110GHz up to 170 GHz through measurements of transmission lines of various lengths. The results indicate that the length of a THRU should be at least 400 micrometers, excluding pads and pad-to-line transitions.\",\"PeriodicalId\":142589,\"journal\":{\"name\":\"2013 IEEE International Conference on Microelectronic Test Structures (ICMTS)\",\"volume\":\"32 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-03-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"15\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 IEEE International Conference on Microelectronic Test Structures (ICMTS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMTS.2013.6528150\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2013.6528150","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz
It is known that the THRU standard (a transmission line) used for thru-reflect-line (TRL) calibration/de-embedding for S-parameter measurement has to be long enough that only a single electromagnetic mode propagates at its center for it to work reliably. But ideally, TRL standards should occupy as little precious silicon real estate as possible. This paper attempts to experimentally find out how long a THRU is long enough above 110GHz up to 170 GHz through measurements of transmission lines of various lengths. The results indicate that the length of a THRU should be at least 400 micrometers, excluding pads and pad-to-line transitions.