微机电系统中卡西米尔力效应的片上实验评估

2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2010-04-26 DOI:10.1109/ESIME.2010.5464555

R. Ardito, B. de Masi, A. Frangi, A. Corigliano

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引用次数: 2

摘要

卡西米尔力对微机电系统(MEMS)力学行为的影响在近年来的科学文献中备受关注。本文报告了在微结构上进行的实验测试的结果，该微结构再现了现实生活中MEMS的基本特征。实验的目的是评估两个平行板之间卡西米尔力的影响，由一个亚微米的间隙分开。考虑到实际MEMS中硅板卡西米尔力的一些特殊特征，通过与理论预测进行比较，对测试结果进行了严格的评估。研究结果表明，卡西米尔力在微纳米器件中发挥着重要作用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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An on-chip experimental assessment Of Casimir force effect in micro-electromechanical systems

The influence of Casimir force on the mechanical behaviour of micro-electro-mechanical systems (MEMS) has deserved much attention in the recent scientific literature. This paper reports the outcomes of an experimental test, carried out on a micro-structure which reproduces the essential features of real-life MEMS. The aim of the experiment was to evaluate the effect of Casimir forces between two parallel plates, separated by a sub-micron gap. The results of the tests are critically evaluated by comparison with theoretical predictions, account taken of some peculiar features of Casimir forces for silicon slabs in real MEMS. The obtained results suggest that Casimir force could play an important role for micro and nano devices.

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2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE)

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