化学镀镍化学镀钯浸金(ENEPIG)键指0.7mil金线短尾问题的解决方案

L. Wai, Lim Teck Guan
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引用次数: 0

摘要

用ENEPIG键合手指在Cu迹线上由5umNi/0.2umPd/0.2umAu层组成,对金丝键合工艺进行了评价。每个包共粘接295根线,线长2.4 ~ 3.8mm不等。在初始设置时遇到了大量的短尾问题,这导致了金属丝粘合过程的不连续性。在失球报警触发短尾后,观察到粘接表面的损伤。采用倒角为90度、瓶颈高度为180um的毛细管设计,缩短了短尾现象。为了实现无短尾,评估了不同的ø0.7mil导线类型。A型线(99% Au)在大多数运行中有短尾,在某些情况下有低线拉读数。B型(99% Au)和C型(99.9% Au)线具有良好的拉丝效果,没有短尾问题。在这项研究中,关键的发现是线材类型对于实现无短尾键合非常重要,正确选择线材可以提供更宽的键合参数窗口。最好的几次运行达到了$ $ gt 1.5$ gf的楔拉强度。从该研究中可以观察到,CA较大、BNH较小的毛细管短尾问题较少。从研究来看,B型和C型没有短尾问题。B型线对预接触和预基磨也有较好的反应。A型焊丝(99% Au)与B型和c型焊丝相比,具有更好的抗扫丝性能。总体而言,B型焊丝在键合连续性和楔拔效果方面效果最好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Solution for Short Tail Issue on Electroless Nickel Electroless Palladium Immersion Gold (ENEPIG) Bond Finger with 0.7mil Gold Wire
Gold wire bonding process was evaluated with ENEPIG bondfingers which consist of 5umNi/0.2umPd/0.2umAu layers on the Cu traces. Total of 295 wires with wire length range from 2.4 to 3.8mm were bonded for each package. Massive short tail issues were encountered at initial set-up, which resulted in the discontinuity of the wire bonding process. Damage on the bonding surface was observed after the short tail happened which triggered by missing ball alarm. Capillary design with chamfer angle (CA) of 90 Degree and bottle neck height (BNH) of 180um was used and the result shows that short tail was reduced. To achieve short tail free, different ø0.7mil wire types were evaluated. Type A wire (99% Au) is having short tail in most of the runs and low wire pull reading in some cases. Type B (99% Au) and Type C (99.9% Au) wire have good wire pull results and do not have short tail issues. In this study, the key finding is that the wire type is very important for achieving short tail free bonding and right selection of wire provides a wider bonding parameter window. The best few runs had achieved wedge pull strength of $\gt 1.5$ gf. from this stud, it is observed that capillary with larger CA and smaller BNH has less short tail issues. From the study, type B and type C do not have short tail issues. Type B wire also has better response to pre-contact and pre-base scrub. Wire type A, (99% Au) has better wire sweep resistance compare to type B and type C. In overall, wire type B has best results in term of bonding continuity and wedge pull results.
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