UV激光固化环氧树脂的设计

2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599) Pub Date : 2002-08-07 DOI:10.1109/POLYTR.2002.1020187

H. Bayer

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引用次数: 3

摘要

环氧树脂是已知的固化由紫外线引发的阳离子活性聚合。来自扫描激光器的单色紫外光具有一些特性，特别是当要固化特定结构时。不同类型的紫外激光器已经被用来固化大约10微米厚度的树脂层。已经开发和筛选了几种树脂配方的成分，用于类似于微激光立体光刻的微电子应用。其中有光引发剂、敏化剂、多元醇和新型环氧化合物。

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Design of epoxy resins for UV laser cure

Epoxy resins are known to be curable by UV initiated cationic living polymerization. The monochromatic UV light from scanning lasers bears some peculiarities, especially when defined structures are to be cured. Different types of UV lasers have been examined to cure resin layers of some ten micrometers thickness. Several ingredients of the resin formulations have been developed and screened for suitability in microelectronic applications similar to micro laser stereolithography. Among those were photoinitiators, sensitizers, polyols and new epoxy compounds.

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2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)

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