一种求解载荷偏转方形膜的新迭代算法

H. Youssef, A. Ferrand, P. Pons, R. Plana
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引用次数: 2

摘要

微机电系统的可靠性直接取决于微观结构的力学行为,其性能与组成它们的材料力学性能的良好知识密切相关。因此,精确地确定这些属性是很重要的。微材料的表征方法多种多样。在这项工作中,我们感兴趣的是膨胀测试技术,以提取方形膜的力学性能。首先,利用ABAQUS软件建立了有限元模型。然后,在Matlab中开发并实现了一种迭代算法,对有限元仿真参数进行控制和优化。其次,搭建了胀形试验台进行实验测量。将迭代算法与Abaqus求解器结合,将仿真结果与实验结果进行拟合。研究表明,该算法收敛速度快,效果好。此外,所提出的方法使我们能够找到任何几何形状和厚度的膜的力学性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A new iterative algorithm for the solution for the load deflection square membranes
The reliability of micro electromechanical systems depends directly on the mechanical behavior of microstructures and their performances are strongly associated with a good knowledge of materials mechanical properties that compose them. Thus, it is important to precisely determine these properties. There are various methods for micro-materials' characterization. In this work, we are interested in the bulge test technique in order to extract the mechanical properties of square shaped membranes. First, a FEM model has been realized with ABAQUS software. Then, an iterative algorithm has been developed and implemented in Matlab, it controls and optimizes the Finite Element simulation parameters. Secondly, a bulge test bench was set up to carry out experimental measurements. The iterative algorithm was then interfaced with the Abaqus software solver and used to fit the simulation results with the experimental measurements. The investigation reveals that the algorithm converges faster and gives good results. Besides, the proposed method allows us to find the mechanical properties of any membrane geometry and thickness.
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