{"title":"一种利用三轴法向应力分量组合的新型压阻式高压传感器","authors":"T. Toriyama, K. Sawa, Y. Tanimoto, S. Sugiyama","doi":"10.1109/MHS.1999.820008","DOIUrl":null,"url":null,"abstract":"A piezoresistive high pressure sensor utilizing a combination of three-axis normal stress components has been developed. Firstly, the principle, FEM analysis, fabrication and characteristics of a newly developed piezoresistive force sensor are briefly summarized. Secondly, the force sensor is adopted as the sensing unit of a high pressure sensor. The pressure sensor is composed of an embedded force sensor unit, a metal diaphragm and a metal case. Pressure is transmitted into force which is applied to piezoresistors on a sensor chip through a force transmission rod. Stresses in piezoresistors depend on the diameter, height and Young's modulus of the rod, and the diaphragm thickness of the sensor chip. In order to obtain large resistance changes in piezoresistors, the optimum combination of these parameters was investigated. A prototype pressure sensor having an SUS630 stainless steel diaphragm of 10 mm-diameter and 1 mm-thickness was fabricated. An output voltage of more than 50 mV/5 V at 150 MPa and a sensitivity temperature characteristic of 0.11% F.S//spl deg/C in the range from room temperature to 150/spl deg/C were realized.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"358 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"A new piezoresistive high pressure sensor utilizing combination of three-axis normal stress components\",\"authors\":\"T. Toriyama, K. Sawa, Y. Tanimoto, S. Sugiyama\",\"doi\":\"10.1109/MHS.1999.820008\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A piezoresistive high pressure sensor utilizing a combination of three-axis normal stress components has been developed. Firstly, the principle, FEM analysis, fabrication and characteristics of a newly developed piezoresistive force sensor are briefly summarized. Secondly, the force sensor is adopted as the sensing unit of a high pressure sensor. The pressure sensor is composed of an embedded force sensor unit, a metal diaphragm and a metal case. Pressure is transmitted into force which is applied to piezoresistors on a sensor chip through a force transmission rod. Stresses in piezoresistors depend on the diameter, height and Young's modulus of the rod, and the diaphragm thickness of the sensor chip. In order to obtain large resistance changes in piezoresistors, the optimum combination of these parameters was investigated. A prototype pressure sensor having an SUS630 stainless steel diaphragm of 10 mm-diameter and 1 mm-thickness was fabricated. An output voltage of more than 50 mV/5 V at 150 MPa and a sensitivity temperature characteristic of 0.11% F.S//spl deg/C in the range from room temperature to 150/spl deg/C were realized.\",\"PeriodicalId\":423453,\"journal\":{\"name\":\"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)\",\"volume\":\"358 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-11-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MHS.1999.820008\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MHS.1999.820008","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A new piezoresistive high pressure sensor utilizing combination of three-axis normal stress components
A piezoresistive high pressure sensor utilizing a combination of three-axis normal stress components has been developed. Firstly, the principle, FEM analysis, fabrication and characteristics of a newly developed piezoresistive force sensor are briefly summarized. Secondly, the force sensor is adopted as the sensing unit of a high pressure sensor. The pressure sensor is composed of an embedded force sensor unit, a metal diaphragm and a metal case. Pressure is transmitted into force which is applied to piezoresistors on a sensor chip through a force transmission rod. Stresses in piezoresistors depend on the diameter, height and Young's modulus of the rod, and the diaphragm thickness of the sensor chip. In order to obtain large resistance changes in piezoresistors, the optimum combination of these parameters was investigated. A prototype pressure sensor having an SUS630 stainless steel diaphragm of 10 mm-diameter and 1 mm-thickness was fabricated. An output voltage of more than 50 mV/5 V at 150 MPa and a sensitivity temperature characteristic of 0.11% F.S//spl deg/C in the range from room temperature to 150/spl deg/C were realized.