一种利用三轴法向应力分量组合的新型压阻式高压传感器

T. Toriyama, K. Sawa, Y. Tanimoto, S. Sugiyama
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引用次数: 4

摘要

研制了一种利用三轴法向应力元件组合的压阻式高压传感器。首先简要介绍了一种新型压阻式力传感器的工作原理、有限元分析、制作方法及特点。其次,采用力传感器作为高压传感器的传感单元。该压力传感器由内嵌式力传感器单元、金属膜片和金属外壳组成。压力通过力传递棒传递为力,力作用于传感器芯片上的压敏电阻。压敏电阻中的应力取决于杆的直径、高度和杨氏模量,以及传感器芯片的隔膜厚度。为了获得较大的压敏电阻变化,研究了这些参数的最佳组合。制作了一个直径10 mm、厚度1 mm的SUS630不锈钢膜片的压力传感器原型。在室温至150/spl℃范围内,实现了150 MPa下大于50 mV/5 V的输出电压和0.11% F.S//spl℃的灵敏度温度特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A new piezoresistive high pressure sensor utilizing combination of three-axis normal stress components
A piezoresistive high pressure sensor utilizing a combination of three-axis normal stress components has been developed. Firstly, the principle, FEM analysis, fabrication and characteristics of a newly developed piezoresistive force sensor are briefly summarized. Secondly, the force sensor is adopted as the sensing unit of a high pressure sensor. The pressure sensor is composed of an embedded force sensor unit, a metal diaphragm and a metal case. Pressure is transmitted into force which is applied to piezoresistors on a sensor chip through a force transmission rod. Stresses in piezoresistors depend on the diameter, height and Young's modulus of the rod, and the diaphragm thickness of the sensor chip. In order to obtain large resistance changes in piezoresistors, the optimum combination of these parameters was investigated. A prototype pressure sensor having an SUS630 stainless steel diaphragm of 10 mm-diameter and 1 mm-thickness was fabricated. An output voltage of more than 50 mV/5 V at 150 MPa and a sensitivity temperature characteristic of 0.11% F.S//spl deg/C in the range from room temperature to 150/spl deg/C were realized.
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