金衬垫上分离材料的三维原子发射光谱

2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Pub Date : 2016-07-18 DOI:10.1109/IPFA.2016.7564292

T. Uchida, A. Tanaka, K. Tsutsumi, N. Ikeo

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引用次数: 1

摘要

俄歇电子能谱(AES)是一种具有高空间和深度分辨率的表面化学分析技术。在本报告中，我们提出了一种新开发的AES系统，该系统通过三维映射来可视化分离材料在Au衬垫上的高分辨率分布。

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Three-dimensional AES of segregated materials on a gold pad

Auger electron spectroscopy (AES) has been developed as a useful technique for chemical analysis of surface regions with high spatial and depth resolution. In this report, we present a newly developed system of AES which visualizes high-resolution distributions of the segregated materials on an Au pad by the 3-dimensional mapping.

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2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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