基于有限元的电子封装界面三维裂纹扩展模拟

U. Ozkan, H. F. Nied
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引用次数: 7

摘要

接口分层现象一直是影响半导体封装可靠性的重要问题。为了更好地理解封装破坏机制,必须对界面缺陷的裂纹萌生和扩展行为进行详细的研究。本文采用丰富有限元法对三维界面裂纹扩展进行了研究。疲劳裂纹扩展模拟技术已经在文献中得到了广泛的研究,用于预测均匀材料裂纹萌生后的稳态裂纹扩展行为,该技术将扩展到三维界面裂纹。所描述的方法使用了巴黎和埃尔多安提出的经典疲劳裂纹扩展速率“定律”的修正版本来模拟循环加载条件下裂纹的稳定扩展,裂纹约束在界面平面上。以循环应变能释放率作为裂纹驱动力,采用丰富有限元法计算裂纹驱动力。以半导体封装可靠性分析为例,用该方法模拟了硅/环氧树脂界面三维裂纹在不同载荷条件下的扩展过程。给出了裂纹前缘的推进曲线和裂纹扩展过程中总应变能释放率随裂纹形状的变化曲线。最后,利用子建模技术对通用包模型进行了裂纹扩展模拟。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Finite element based three dimensional crack propagation simulation on interfaces in electronic packages
Interface delamination phenomenon has been a great concern for semiconductor package reliability. In order to better understand the package failure mechanisms, crack initiation and propagation behavior of interface flaws have to be investigated in detail. In this paper, three dimensional interface crack propagation is examined using the enriched finite element method. A fatigue crack growth simulation technique, which has been widely studied in the literature to predict steady state crack growth behavior after crack initiation in homogeneous materials, is extended to three dimensional interface cracks. The method described uses a modified version of the classical fatigue crack growth rate "law" developed by Paris and Erdogan to simulate stable crack growth under cyclic loading conditions, with the crack constrained to the plane of the interface. The crack driving force, which is chosen as cyclic strain energy release rate, is calculated using the enriched finite element method. As a practical example in semiconductor package reliability analysis, the method is used to simulate the propagation of a three-dimensional interface crack on a silicon/epoxy interface under various loading conditions. Plots of advancement of the crack front and the changes in total strain energy release rates as the crack shape evolves during propagation are also given. Lastly, crack propagation simulation is demonstrated for a generic package model using a submodeling technique.
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