发光多孔多晶硅薄膜的表面电子结构

1997 IEEE Hong Kong Proceedings Electron Devices Meeting Pub Date : 1997-08-30 DOI:10.1109/HKEDM.1997.642350

P. Han, H. Wong, M. Poon

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引用次数: 0

摘要

利用x射线光电子能谱(XPS)研究了发光多孔多晶硅(PPS)的表面电子结构。我们发现只有在含有微量硅纳米团簇的薄膜中才能观察到具有强光致发光效应的PPS薄膜，并且通过对PPS表面进行适当的钝化可以显著增强其发光效果。

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Surface electronic structure of light-emitting porous polycrystalline silicon thin films

Surface electronic structure of light-emitting porous polycrystalline silicon (PPS) is studied using X-ray photoelectron spectroscopy (XPS). We find that the PPS films with strong photoluminescence effect can only be observed in thin films with trace amounts of silicon nanoclusters and the luminescence can be enhanced remarkably with proper passivation of the PPS surface.

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1997 IEEE Hong Kong Proceedings Electron Devices Meeting

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