基于V93k AVI64直流刻度卡的快速太欧姆测量方法

2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) Pub Date : 2019-03-01 DOI:10.1109/ICMTS.2019.8730977

Joem Stolle, Regis Poirier, Martin Froehle, Hermann Weindl, M. Naiman, V. Kriegerstein

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引用次数: 0

摘要

本文介绍了一种大规模并行测试的测量方法，该方法可以在低功耗测试条件下，使用Advantest V93000 AVI64设备对兆欧姆电阻和千兆欧姆隔离结构进行表征，以进行工艺表征。此外，它展示了如何完成电阻读数到个位数太欧姆的技术。与参数基准工具相比，我们是近似的。速度快5倍，具有足够的精度和高重复性。新的测量方法应用于一种先进的CMOS技术的互连过程表征。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fast Tera-Ohm Measurement Approach Using V93k AVI64 DC Scale Card

This paper describes a measurement approach for massive parallel testing enabling characterization of Mega-Ohm resistor and Giga-Ohm isolation structures for process characterization using low power test conditions with Advantest V93000 AVI64 equipment. Moreover, it exhibits the technique how to accomplish resistance readings up to single digit Tera-Ohms. Compared to a parametric benchmark tool, we are approx. 5x faster with sufficient accuracy and high repeatability. The new measurement methodology was applied for interconnect process characterization of an advanced CMOS technology.

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2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)

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