近红外连续波长透镜内光谱光子发射显微镜系统

2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits Pub Date : 2007-07-11 DOI:10.1109/IPFA.2007.4378092

S.L. Tan, KH Toh, J. Phang, D.S.H. Chan, C. Chua, L. Koh

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引用次数: 4

摘要

研制了一种近红外连续波长透镜内光谱光子发射显微镜。色散元件是一个三元棱镜，专门设计用于在光轴上分散0.9 ~ 1.6 μ m的光。该系统已用于正反偏pn结和饱和nmosfet的正面和背面光谱分析。正面和背面光谱的差异是由于背面光谱的“硅滤光效应”和正面光谱的介电介质的光学效应。

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A Near-Infrared, Continuous Wavelength, In-Lens Spectroscopic Photon Emission Microscope System

A near-infrared continuous wavelength, in-lens spectroscopic photon emission microscope has been developed. The dispersive element is a three-element prism which has been specially designed to disperse light from 0.9 mum to 1.6 mum about the optical axis. The system has been used to perform frontside and backside spectroscopy on forward and reverse-biased p-n junctions and saturated nMOSFETs. The difference in the frontside and backside spectra is due to the "silicon filter effect" for the backside spectra and the optical effects of the dielectrics for the frontside spectra.

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2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits

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