Innovative and 3D stacking Micro Electro Mechanical Systems (I-MEMS) for power saving

The Innovative Micro Electro Mechanical Systems (I-MEMS) device was developed to reduce the power consumption of next-generation electronic devices. I-MEMS devices eliminate standby power when used as a power gating device. In logic circuit applications, I-MEMS devices provide for extremely low power consumption and remain robust during high temperature operation. I-MEMS devices are very reliable and can operate at current CMOS digital voltage (1V). This paper will review current MOSFET and MEMS technologies, analyze problems in conventional MEMS, and provide solutions for these problems.