一种可移动屏蔽盒，适用于商用自动晶圆探测器

ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures Pub Date : 1993-03-22 DOI:10.1109/ICMTS.1993.292917

M. Lozano, C. Cané, J. Santander, I. Gràcia, E. Lora-Tamayo

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引用次数: 0

摘要

提出了一种紧凑的可移动屏蔽盒，可以很容易地适应商用自动晶圆探头。本设计允许在屏蔽区域实现自动晶圆映射。它只覆盖卡盘和探针区域，避免使用笨重的法拉第盒。对其设计进行了说明，并通过测量亚阈值电流证明了其有效的屏蔽能力

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A moveable shielding box adaptable to commercial automatic wafer probers

A compact movable shielding box designed to be easily adapted to commercial automatic wafer probers is presented. This design allows the realization of automatic wafer mapping in a shielded area. It only covers the chuck and the prober area, avoiding the use of cumbersome Faraday boxes. Its design is explained, and the effective shielding capabilities are demonstrated by measuring subthreshold currents.<>

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ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures

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