SnAg3.0Cu0.5圆柱铜柱的电迁移可靠性

L. Meinshausen, K. Weide-Zaage, B. Goldbeck, A. Moujbani, J. Kludt, H. Frémont
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引用次数: 2

摘要

消费电子产品的主要趋势是提高其产品的性能和降低成本。这些趋势导致封装级的持续集成,从而导致焊锡触点的尺寸减小。这与对热机械应力和由电迁移(EM)引起的空隙形成的更高敏感性有关。在这种背景下,铜柱凸点被引入,因为它们结合了金属线键的坚固性和回流焊接的低键合压力。实验结果表明,在电磁测试中,铜柱凸起的寿命更长,但仍需要持续的分析来优化设计。在此背景下,进行了有限元分析(FEA),比较了传统焊料凸点和两种不同设计铜柱凸点的电磁感应质量通量。利用ANSYS®软件进行热电模拟。然后用用户程序计算电磁诱发的质量通量和质量通量散度。仿真结果用于确定铜柱凸点电磁性能提高的可能原因,并有助于确定较好的设计。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electromigration reliability of cylindrical Cu pillar SnAg3.0Cu0.5 bumps
The main trends in consumer electronics are increasing performances of their products and a reduction of the costs. These trends lead to an ongoing integration on package level which leads to a decreasing size of the solder contacts. This goes along with a higher sensibility to thermal-mechanical stress and void formation due to electromigration (EM). Against this background copper pillar bumps were introduced, because they combine the robustness of metal wire bonds with the low bonding pressure of reflow soldering. Experimental results have shown a longer lifetime of Cu pillar bumps during EM tests, but a continuative analysis is still needed for design optimization. Against this background a finite element analysis (FEA) was performed to compare the EM induced mass flux in conventional solder bumps and in two different designs for Cu pillar bumps. The thermal electrical simulations were performed with ANSYS®. Afterwards a user routine was used to calculate the EM induced mass fluxes and mass flux divergences. The simulation results are used to identify possible reasons for the increased EM performance of Cu pillar bumps and they enable the identification of preferable designs.
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