光学非互易器件用硅导层磁光波导的制备工艺

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2017-06-13 DOI:10.23919/LTB-3D.2017.7947478

Salinee Choowitsakunlert, K. Takagiwa, Takuya Kobashigawa, Nariaki Hosoya, R. Silapunt, H. Yokoi

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引用次数: 0

摘要

研究了一种采用非互易导辐射模式转换的光隔离器。该器件由带硅导层的肋型磁光波导组成。阐明了不同间隙下波导参数对隔离器工作的影响关系。通过比较隔离器工作时的波导参数，讨论了磁光波导的制作工艺。

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Fabrication processes of magneto-optic waveguides with Si guiding layer for optical nonreciprocal devices

An optical isolator employing a nonreciprocal guided-radiation mode conversion has been investigated. This device consists of a rib-type magneto-optic waveguide with a Si guiding layer. Relationship of waveguide parameters for isolator operation was clarified for various gaps. Fabrication processes of the magneto-optic waveguides are discussed by comparing waveguide parameters for isolator operation.

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2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

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